The Effect of Constant and High Voltage Pulse Bias Potentials on the Structure and Properties of Vacuum-Arc (TiVZrNbHf)Nх Coatings

Authors O.V. Sobol’1 , А.А. Postelnyk1 , R.P. Mygushchenko1 , V.F. Gorban’2, V.A. Stolbovoy3 , A.V. Zvyagolskiy1

1National Technical University «Kharkiv Polytechnic Institute», 2, Kyrpychov Str., 61002 Kharkiv, Ukraine

2Frantsevich Institute for Problems of Materials Science, 3, Krzhizhanovsky Str., 03142 Kyiv-142, Ukraine

3National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, Ukraine

Issue Volume 10, Year 2018, Number 2
Dates Received 11 December 2017; published online 29 April 2018
Citation O.V. Sobol’, А.А. Postelnyk, R.P. Mygushchenko, et al., J. Nano- Electron. Phys. 10 No 2, 02035 (2018)
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Keywords Vacuum arc, (TiVZrNbHf)Nх, Structural engineering, Bias potential (2) , Pulse potential, Phase composition (3) , Structure (104) , Hardness (12) .

The effect of constant (Ub) and high voltage pulse (Uip) bias potentials supplied to the substrate during condensation, on the structure and properties of vacuum-arc (TiVZrN-Hf)Nх coatings has been studied. It has been determined that the number and size of the drop phase decreases with increasing Ub. The use of Uip promotes a more uniform growth in the coating volume. It is shown that due to the increase of Ub from 0 to 200 V in nitride coatings of high entropy alloys, it is possible to change the growth texture [100] to [111]. This results in increased hardness from 32 GPa to 49 GPa. The supply of high voltage potential in a pulse form leads to a relative decrease in the average size of crystallites and the formation of a bi-texture state.Conditions and mechanisms of the preferential crystallites orientation (axial texture) of vacuum arc (TiVZrNbHf)Nх coatings and texture influence on mechanical properties have been discussed.

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