Magnetic, Electrical and Surface Morphological Characterization of AuGe/Ni/Au Ohmic Contact Metallization on GaAs/AlGaAs Multilayer Structures
| Authors | T.S. Abhilash, Ch. Ravi Kumar, G. Rajaram |
| Affiliations | School of Physics and Centre for Nanotechnology, University of Hyderabad, Hyderabad - 500046, India |
| Е-mail | abhilashthanniyil@gmail.com |
| Issue | Volume 3, Year 2011, Number 1, Part 2 |
| Dates | Received 04 February 2011, in final form 28 April 2011, published online 08 May |
| Citation | T.S. Abhilash, Ch. Ravi Kumar, G. Rajaram, J. Nano- Electron. Phys. 3 No1, 396 (2011) |
| DOI | |
| PACS Number(s) | 73.61.Ey, 75.70. – i, 85.40.Ls |
| Keywords | GaAs/AlGaAs, Hall sensors, Magnetic properties (7) , Ohmic contact (5) . |
| Annotation |
A process issue arising from the use of ferromagnetic Nickel in the AuGe/Ni/Au Ohmic contact metallization is studied in the context of magnetic field sensors and HEMT devices made using GaAs/AlGaAs multilayer structures with the two dimensional electron gas layer. The dependence of magnetization, contact resistance, adhesion, surface roughness and current distribution of alloyed Ohmic contacts on parameters such as Ni layer thickness, anneal temperature and Au-Ge alloy composition are discussed. The magnetization measurements provided some new and interesting insights into changes occurring in the metallization layers prior to alloying. |
|
List of References |
Other articles from this number
1) Influence of Thermal Annealing on Structural and Electrical Properties of Nickel Oxide Thin Films [0225-0231]2) Electrophysical Properties of Ge/Cr Thin Films [0232-0235]
3) Double Acceptor Interaction in Semimagnetic Quantum Dot [0236-0239]
4) Elastic Constants and Its Pressure Derivative of Boron Phosphide Using Higher-Order Perturbation Theory [0240-0242]
5) Review of MEMS Test Structures for Mechanical Parameter Extraction [0243-0253]
6) Synthesis, Structural and Optical Study of CdS Nanoparticles Doped With Different Concentration of Cu [0254-0259]
7) Effect of Annealing on Structural, Optical and Electrical Behaviours of WO3 Thin Films Prepaired by Physical Vapour Deposition Method [0260-0267]
8) Electronic Structure and Magnetic Properties of Cobalt Doped Zinc Oxide [0268-0273]
9) Structural and Substructural Properties of the Zinc and Cadmium Chalcogenides Thin Films (a Review) [0274-0301]
10) Structural Investigation of Sbgese Glasses by High Resolution X-Ray Photoelectron Spectroscopy [0302-0307]
11) Thermal and Dielectric Studies on Ge10Se69Tl21 Chalcogenide Glass [0308-0312]
12) Optical Band Gap Study of Bi1-xSbx (x = 0.10, 0.15 & 0.20) Thin Films [0313-0317]
13) Comparison of Thermal Evaporation and Plasma Assisted Thermal Evaporation Processes for Deposition of tin Oxide Thin Films [0318-0322]
14) Correlation of Raman and Photoluminescence Spectra of Al2O3 Capped Silicon Nanoparticles Grown by Reactive Pulsed Laser Deposition [0323-0329]
15) Temperature Dependent Switching Behavior of BFN Thin Films: a Wide Band Gap Semiconductor [0330-0340]
16) Electronic Properties of Tin Telluride: a First Principles Study [0341-0347]
17) Analysis of High Energy Ion, Proton and Co-60 Gamma Radiation Induced Damage in Advanced 200 GHz Sige HBTS [0348-0357]
18) Field-Emission Study of Multi-Walled Carbon Nanotubes Grown on Si Substrate by Low Pressure Chemical Vapor Deposition [0358-0361]
19) Optical and Electrochromic Properties of E-Beam Evaporated Nickel Oxide Thin Film [0362-0369]
20) Properties of Silicon Dioxide Films Prepared Using Silane and Oxygen Feeds by PE-CVD at low Power Plasma [0370-0375]
21) P-Type Transparent nio Thin Films by E-Beam Evaporation Techniques [0376-0383]
22) Excited States of a Magnetic Polaron in a Quantum Well [0383-0387]
23) Temperature Induced Stress Dependent Photoluminescence Properties of Nanocrystallite Zinc Oxide [0388-0395]
24) Thermal and Optical Study of Te15(Se100-xBix)85 (x = 0, 1, 3) Chalcogenide Glasses [0404-0408]
25) Zinc Oxide Nanostructures by Oxidation of Zinc Films Deposited on Oxidized Silicon Substrate [0409-0413]
26) Micro-Raman and UV-Vis Studies of 100 MEv Ni4+ Irradiated Cadmium Telluride Thin Films [0414-0417]
27) The Silicon-to-Silicon Anodic Bonding Using Sputter Deposited Intermediate Glass Layer [0418-0425]
28) low Temperature Effects on Electrical and Optical Properties of Vacuum Annealed Zinc Tetra- Tert- Butyl 2, 3 Naphthalocyanine Thinfilms [0426-0432]
29) Effect of Additives on Grain Size and Ammonia Sensing Properties of Sprayed Pure and CuO Modified ZnO Thin Films [0433-0440]
