Structural and Optical Study of Er2O3 Thin Films Grown by Spray Pyrolysis from Erbium Nitrate
| Authors | O.V. Moskalenko1, A.B. Liapina2, O.M. Strilchuk2, L.V. Shcherbyna2, T.V. Torchynska3 |
| Affiliations |
1Mykola Gogol State University of Nizhyn, 16600 Nizhyn, Ukraine 2V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 03028 Kyiv, Ukraine 3Instituto Politécnico Nacional, ESFM, 07738 México City, Mexico |
| Е-mail | mov5@ukr.net |
| Issue | Volume 18, Year 2026, Number 3 |
| Dates | Received 15 January 2026; revised manuscript received 16 June 2026; published online 26 June 2026 |
| Citation | O.V. Moskalenko, A.B. Liapina, et al., J. Nano- Electron. Phys. 18 No 3, 03032 (2026) |
| DOI | https://doi.org/10.21272/jnep.18(3).03032 |
| PACS Number(s) | 61.66.Fn, 68.55. – a, 78.30. – j, 82.30.Lp |
| Keywords | Erbium oxide, Thin films (60) , XRD (100) , FTIR (31) , Raman scattering (4) . |
| Annotation |
This paper reports on the relationship between the crystalline structure and optical properties of Er2O3 films grown by spray pyrolysis. The films were deposited on Si(100) substrates heated to 400 °C via thermal decomposition of an erbium nitrate precursor. Additional annealing was performed at 600 and 800 °C in a nitrogen atmosphere. The structural and optical properties of the films were investigated in comparison with powder samples using X-ray diffraction (XRD), Raman spectroscopy, and Fourier transform infrared (FTIR) spectroscopy, complemented by an analysis of precursor decomposition. XRD results confirm the formation of single-phase cubic Er2O3 with a bixbyite structure. A pronounced preferred crystallographic orientation is observed in thin films, in contrast to randomly oriented powder samples. Annealing significantly enhances diffraction peak intensity without noticeable changes in peak positions, indicating improved crystallinity and texture development without phase transformation. Raman spectra reveal a gradual evolution from a disordered structure in as-deposited films to well-defined vibrational modes associated with Er–O bonds after annealing. FTIR analysis confirms the formation of Er–O bonds and the absence of nitrate-related features, indicating complete precursor decomposition. The results demonstrate that thermal treatment plays a crucial role in transforming precursor-derived films into chemically pure and structurally ordered Er2O3 with pronounced preferred orientation governed by substrate effects and growth conditions. |
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List of References |
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