Determination of Optimal Modes of Electron-Beam Micro-Treatment of Surfaces in Optic Elements

Authors I.V. Yatsenko1 , V.S. Antonyuk2 , V.А. Vashchenko1, V.I. Gordienko1, S.О. Kolinko1, Т.І. Butenko1

1Cherkasy State Technological University, 460, Shevchenka Blvd., 18006 Cherkassy, Ukraine

2National Technical University of Ukraine "Kyiv Polytechnic Institute named after Igor Sikorsky", 37, Peremohy Ave., 03056 Kyiv, Ukraine

Issue Volume 14, Year 2022, Number 4
Dates Received 25 May 2022; revised manuscript received 10 August 2022; published online 25 August 2022
Citation I.V. Yatsenko, V.S. Antonyuk, V.А. Vashchenko, et al., J. Nano- Electron. Phys. 14 No 4, 04012 (2022)
PACS Number(s) 42.79.Bh
Keywords Belt-type electronic beam, Elements from optical glass and optical ceramics, Temperature fields in optical elements, Optoelectronic instrumentation.

As practice has shown, the most erratic, environmentally friendly, and easily controllable way of opti-cal element treatment is the electron-beam method. However, the widespread use of electron beam tech-nology in optoelectronic instrumentation is hampered by the lack of methods for determining optimal modes of electron beam microprocessing of optical elements, representing a set of controlled parameters of the electron beam (current of the beam Ib = 50…300 mА, accelerating voltage Vу = 4…8 kV, distances to the treated surface l = 6x10 – 2… 8x10 – 2 m, beam movement speed V = 5x10 – 2…5x10 – 3 m/s, heat exposure time t = 0.3…1.0 s), excess of which leads to a number of undesirable phenomena, that harm the quality of the surfaces to be treated.There have been developed the mathematical models of the process of heating ele-ments from optical glass and ceramics of various geometric shapes and sizes (thin film elements, thin plates of high size) by a moving belt electron beam, which allow to calculate the influence of its parameters on temperature fields in treated elements. It was established that the increase in the Ib and Vу parameters in the specified ranges leads to an increase in the maximum surface temperature of optical elements by more than 2 times, and the decrease in the parameters l and V by less than 1.5 times. Optimal values of the parameters of the electron beam are determined, the excess of which leads to the appearance of cracks and splits in the surface layers of elements, violation of their geometric shape and deterioration of the metrological characteristics of the devices up to their failure.

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