Structure аnd Physical-Mechanical Properties of nc-TiN Coatings Obtained by Vacuum-Arc Deposition and Deposition of HF Discharge

Authors A.D. Pogrebnyak1, A.M. Mahmud1, I.T. Karasha1, G.V. Kirik2, R.Y. Tkachenko1, A.P. Sypylenko1

1 Sumy State University, 2, Rimsky-Korsakov Str., 40007 Sumy, Ukraine

2 Concern “Ukrrosmetal” Sumy, Ukraine

Issue Volume 3, Year 2011, Number 4
Dates Received 12 September 2011, in final form 06 December 2011, published online 30 December 2011
Citation A.D. Pogrebnyak, A.M. Mahmud, I.T. Karasha, et. al, J. Nano- Electron. Phys. 3 No4, 73 (2011)
PACS Number(s), 61.46.Hk, 62.20.Qp.68.37.Hk, 81.15. – z
Keywords nc-TiN, Coatings (10) , SEM (95) , RSA (4) , Nanohardness, Elastic modulus, Adhesion, Tribological and deformation characteristics.
Using scanning electron microscopy (SEM), rengen-structural analysis (RSA), adhesion strength, friction coefficient and wear rate of the material and studied the properties of the coatings nc – TiN. Depending on the bias potential applied to the substrate and the chamber pressure, the inclusion of HF discharge, it is shown that the combination of different parameters recorded during scratching, allows us to distinguish the threshold of critical loads that are linked to different types of cohesive and adhesive fracture coatings in tribological tests. Sizes were determined nanograins nc – TiN stoichiometry of coatings, as well as the phase of elemental composition and morphology of the surface flooring.

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