Preparation of Fe-Based Composite Materials with Controlled Cu and Au Doping by a Three Source EB-PVD Technique

The paper presents a technological approach to modifying the iron vapor flow during electron beam physical vapor deposition (EB-PVD) by introducing a directed atomic flow of 1A subgroup alloying elements (Cu, Au). A technological scheme was proposed, consisting of three types of substrates: a vertical stationary substrate designed to analyze the vertical distribution of components in the vapor stream depending on the angle of inclination of the evaporator (5°, 15°, 45° and 65°); a horizontal stationary substrate designed to control the basic parameters of the deposition process without rotation; a cylindrical substrate, rotating, the main working substrate for obtaining composites with a uniform distribution of components. The proposed deposition scheme allows geometrically controlled mixing of vapor streams in a vacuum with the formation of homogeneous composites in the NaCl matrix without layering of the initial components. It has been revealed that the angle of inclination of the peripheral evaporator determines the degree of overlap of the flows, which controls the concentration of dopant impurities in the films up to 1.9 mas. % Cu and 9.4 mas. % Au. The obtained films are characterized by a dense crystalline structure with columnar grain sizes of 0.8 … 1.4 m, which is typical for non-equilibrium condensation conditions at temperatures lower than 0.3 of the melting point of the main components. It has been shown that the use of a rotating cylindrical substrate ensures a more uniform distribution of components and promotes the formation of homogeneous compositions. The results obtained confirm the prospects of using co-deposition from multiple evaporation sources EB-PVD technique with controlled doping to form metal-salt composites with potential applications of their active components in the fields of catalysis, biomedical coatings and magnetic structures.