Study of the Elemental Composition of Thin Films of CoNi and FeNi Alloys by X-ray Spectral Microanalysis
| Authors | V.B. Loboda , S.M. Khursenko , V.O. Kravchenko, V.M. Zubko, A.V. Chepizhnyi |
| Affiliations |
Sumy National Agrarian University, 40021 Sumy, Ukraine |
| Е-mail | loboda-v@i.ua |
| Issue | Volume 17, Year 2025, Number 2 |
| Dates | Received 12 January 2025; revised manuscript received 22 April 2025; published online 28 April 2025 |
| Citation | V.B. Loboda, S.M. Khursenko, V.O. Kravchenko, et al., J. Nano- Electron. Phys. 17 No 2, 02020 (2025) |
| DOI | https://doi.org/10.21272/jnep.17(2).02020 |
| PACS Number(s) | 81.15. – z, 82.80.Ej |
| Keywords | X-ray spectral microanalysis, Chemical composition, Thin films (60) , Nanocrystalline films, Alloys (16) . |
| Annotation |
The article presents the results of studying the elemental composition of CoNi and FeNi alloy nanocrystalline films by X-ray spectral microanalysis (X-ray microanalyzer based on an energy-dispersive spectrometer, which is part of the REM-103-01 scanning electron microscope). The alloy films with thicknesses of 10-200 nm were obtained by condensation of evaporated initial massive binary CoNi and FeNi alloys in a vacuum of 10 – 4 Pa. The CoNi alloys were evaporated by an electron beam using an electron diode gun with a condensation rate of 0.5-1.5 nm/s. The purity of the initial Co and Ni metals was at least 99.9 %. The concentrations of the CoNi alloy film components varied over a wide range. The FeNi alloy films were obtained by evaporation of Permalloy 50N technical alloy. The characteristic X-ray spectrum of the film substance was excited by scanning a film section with dimensions of 300 300 m with an electron beam; for thicker films, the scanning section size was 1 1 m. Thin Ni films of the same thickness were used as standards when conducting quantitative measurements of the elemental composition of alloy films of a certain thickness. The results of X-ray microanalysis indicate high purity of the films. Comparison of the results of X-ray microanalysis measurements of the concentrations of the initial alloys and the obtained films showed their coincidence within the limits of the analysis error. |
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List of References |
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