Structure of TiAlN Reactive Sputtered Coatings
| Authors | V.N. Denisov1,2, B.N. Mavrin2, E.A. Vinogradov2, S.N. Polyakov1, A.N. Kirichenko1, K.V. Gogolinsky1, A.S. Useinov1, V.D. Blank1, V. Godinho3,4, D. Philippon3, A. Fernandez3 |
| Affiliations | 1 Technological Institute for Superhard and Novel Carbon Materials, Troitsk, Moscow region, 142190 Russia 2 Institute of Spectroscopy of RAS, Troitsk, Moscow region, Phizicheskaya street 5, 142190 Russia 3 Instituto de Ciencia de Materiales de Sevilla CSIC-US Avenida Americo Vespucio 49, 41092 Sevilla, Spain 4 Université Libre de Bruxelles Faculty of Applied Sciences, Chemicals and Materials Department, Avenue F.D.Roosevelt, 50 (CP165/63) 1050 Brussels, Belgium |
| Е-mail | denisovvn@ntcstm.troitsk.ru |
| Issue | Volume 4, Year 2012, Number 1 |
| Dates | Received 19 November 2011; published online 14 March 2012 |
| Citation | V.N. Denisov, B.N. Mavrin, E.A. Vinogradov, et al. J. Nano-Electron. Phys. 4 No 1, 01021 (2012) |
| DOI | |
| PACS Number(s) | 2.20.F, 62.20 – x, 78.30Ly, 78.30. – j, 61.05.C, 61.05.cp |
| Keywords | Coating (35) , Hardness (12) , Reactive Sputtering, TiAlN, X-Ray Diffraction (19) , Raman Spectroscopy (18) . |
| Annotation | The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm1 or in the region of 830 850 cm1 depending on the deposition parameters whereas it is not exceed 630 cm1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. |
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List of References |
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