Morphological and Optical Properties of Silicon Micro-nanostructures Induced by DC Corona Discharge at Atmospheric Pressure

Authors O. Boudia1,2, F. Bitam-Megherbi1,2, M. Mekious1,2, F. Bouaraba1,2, M. Megherbi1
Affiliations

1Advanced Technologies Laboratory for Electrical Engineering, Tizi-Ouzou, Algeria

2Mouloud Mammeri University of Tizi-Ouzou, Algeria

Е-mail ferroudja.bitammegherbi@ummto.dz
Issue Volume 17, Year 2025, Number 4
Dates Received 19 June 2025; revised manuscript received 21 August 2025; published online 29 August 2025
Citation O. Boudia, F. Bitam-Megherbi, et al., J. Nano- Electron. Phys. 17 No 4, 04004 (2025)
DOI https://doi.org/10.21272/jnep.17(4).04004
PACS Number(s) 71.20.Mq, 73.40.Ty, 78.66.Fd
Keywords Silicon (58) , Surface microstructures morphology, Corona discharge, Reflectivity (3) , Optical properties (22) .
Annotation

In this work, the progressive evolution of silicon surface micro-nanostructures was demonstrated using a DC negative corona discharge at atmospheric pressure in ambient air. The morphologies of textured multicrystalline silicon (mc-Si) and monocrystalline silicon (c-Si) wafers were observed using scanning electron microscopy. It was found that, with increasing treatment duration under corona discharge, various microstructures were formed, such as microspheres on the mc-Si wafer and microspikes with spherical tips on the c-Si wafer. The surface reflectance of the fabricated microstructures was studied using a UV-VIS spectrophotometer. The results showed that the light-trapping effect was significantly enhanced by the microstructures produced during corona plasma treatment, leading to a substantial reduction in light reflectance. The surface reflectivity in the wavelength range of 200 nm to 1000 nm was found to be less than 8 % for the textured mc-Si and as low as 0.78 % for the textured c-Si. Additionally, the photoluminescence properties of the microstructures revealed a red shift in the emission peaks. This effect could be beneficial for the development of silicon-based photovoltaic cells, optoelectronic devices, and luminescent applications.

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