Experimental Investigation of the Distribution of Energy Deposited by FIB in Ion-beam Lithography
| Authors | M. Muratov1, M. Myrzabekova1, N. Guseinov1, R. Nemkayeva1, D. Ismailov1, Ya. Shabelnikova2, S. Zaitsev2 |
| Affiliations |
1National Nanotechnological Laboratory of Open Type, Al-Farabi Kazakh National University, Almaty, Kazakhstan 2Institute of Microelectronics Technology and High-Purity Materials RAS, Chernogolovka, Russia |
| Е-mail | |
| Issue | Volume 12, Year 2020, Number 4 |
| Dates | Received 21 April 2020; revised manuscript received 15 August 2020; published online 25 August 2020 |
| Citation | M. Muratov, M. Myrzabekova, N. Guseinov, et al., J. Nano- Electron. Phys. 12 No 4, 04038 (2020) |
| DOI | https://doi.org/10.21272/jnep.12(4).04038 |
| PACS Number(s) | 82.35. − x, 85.40.Hp |
| Keywords | Ion-beam lithography, Resist (35) , FIB (Focused ion beam), Poly (methyl methacrylate) (PMMA), Gallium ion, Sensitivity (11) , Contrast. |
| Annotation |
The first and rigorous sensitivity comparison of the most used positive-tone resist (PMMA 950K) exposure to both electrons and gallium ions in a wide range of exposure doses at the same beam energy was carried out. It was found that the PMMA 950K resist has a positive sensitivity of 0.15 C/cm2, which is about three orders of magnitude more sensitive to gallium ions than to electrons, all at the same conditions. At high Ga exposure doses, as well as with electron exposure, negative sensitivity is observed. The depth of the resist after etching in a solvent depending on the exposure dose was also studied, and based on this an analytical model using the absorbed energy density in the form of a displaced Gaussian, that allows one to restore the resist contrast and the energy length from experimental data, was proposed. The model accurately describes the both experimental and simulation results. It was shown that the contrast for the PMMA 950K resist is γ ~ 3.1 for the energies of gallium ions and the energy length is Le = 43 nm. |
|
List of References |
Other articles from this number
1) Fabrication and Characterization of Polyaniline Nanofiber Films by Various Techniques [04001-1-04001-5]2) Nonlinear Model of Ice Surface Softening during Friction Taking into Account Spatial Heterogeneity of Temperature [04002-1-04002-6]
3) Effect of Different Heat Treatment Regimes on Electrical Properties and Microstructure of n-Si [04003-1-04003-5]
4) Synthesis and Characterization of Temperature Controlled SnO2 Nanoparticles by Solid-state Reaction Method [04004-1-04004-6]
5) Simulation of Fracture Dynamics of Two-dimensional Titanium Carbide Ti2C under Different Types of Tensile Loading [04005-1-04005-4]
6) Features of Structural Organization of Nanodiamonds in the Polyethylene Glycol Matrix [04006-1-04006-6]
7) Characterization of Crystal Structure and Magnetic Properties of Zn(1 – x)MnxO (x = 0.086 and 0.090) Nanoparticles Synthesis Results Using Coprecipitation Method [04007-1-04007-4]
8) Effect of pH on Structural Morphology and Magnetic Properties of Ordered Phase of Cobalt Doped Lithium Ferrite Nanoparticles Synthesized by Sol-gel Auto-combustion Method [04008-1-04008-7]
9) A Low-profile Ultra-wideband LTCC Based Microstrip Antenna for Millimeter-wave Applications under 100 GHz [04009-1-04009-6]
10) Fabrication and Interpretation of Zinc-Cerium Composite: Structural and Thermal Studies [04010-1-04010-5]
11) Features of the Initial Stage of the Formation of Ti-Zr-Ni Quasicrystalline Thin Films [04011-1-04011-6]
12) Structural Studies of Mechanically Alloyed Fe1–xAlx Powder [04012-1-04012-5]
13) Hydrogen Adsorption on Li+ and Na+ Decorated Coronene and Corannulene: DFT, SAPT0, and IGM Study [04013-1-04013-6]
14) Realization of the Kelvin Probe System for the Surface Treatment of a Semiconductor [04014-1-04014-6]
15) Effect of Weak Confinement on the Optical Properties of Chemically Synthesized ZnS Nanoparticles [04015-1-04015-5]
16) Influence of the Vector Order Parameter on the Dynamics of 3D Ultrashort Pulses in Carbon Nanotubes [04016-1-04016-4]
17) Structural, Optical and Electrical Properties of Ce Doped SnO2 Nanoparticles Prepared by Surfactant Assisted Gel Combustion Method [04017-1-04017-6]
18) Sintering Temperature Dependent Structural and Mechanical Studies of BaxPb1 − xTiO3 Ferroelectrics [04018-1-04018-5]
19) Impact of Concentration of Nanoparticles on Characteristics of Transformer Oil [04019-1-04019-4]
20) Effect of the Porous Silicon Layer Structure on Gas Adsorption [04020-1-04020-5]
21) Light Emission from Silicon Structures with Dielectric Insulation [04021-1-04021-5]
22) Crystal Growth and Electro-optical Characterization of In2Se2.7Sb0.3 Compound [04022-1-04022-4]
23) Electron Energy in Rectangular and Cylindrical Quantum Wires [04023-1-04023-5]
24) An Ultra-low Power, High SNM, High Speed and High Temperature of 6T-SRAM Cell in 3C-SiC 130 nm CMOS Technology [04024-1-04024-4]
25) Measurement of the Angle of Attack of an Aerophysical Missile Complex in Flight Based on the Hall Effect Sensor and Electronic Measurement System [04025-1-04025-5]
26) Peculiarity of Elastic and Inelastic Properties of Radiation Cross-linked Hydrogels [04026-1-04026-5]
27) Structural and Optical Properties of Polycrystalline ZnO Nanopowder Synthesized by Direct Precipitation Technique [04027-1-04027-5]
28) Improving the Solar Collector Base Model for PVT System [04028-1-04028-5]
29) The Effect of Graphene Oxide on the Properties and Release of Drugs from Apatite-Polymer Composites [04029-1-04029-7]
30) Adhesion Strength of TiZrN/TiSiN Nanocomposite Coatings on a Steel Substrate with Transition Layer [04030-1-04030-6]
31) Thermal Effects on the Surface Morphology of an Ion-plasma Coating [04031-1-04031-5]
32) Some Properties and Structural Features of Poly(Vinyl Chloride)/Cu Films with Copper Nanoparticles Obtained by Exploding Wire Methodu [04032-1-04032-5]
33) Some Types of Carbon-based Nanomaterials as Contrast Agents for Photoacoustic Tomography [04033-1-04033-6]
34) Dynamics of Receiving Electroelastic Spherical Shell with a Filler [04034-1-04034-7]
35) The Effect of Chemical Composition and Electrolyte Temperature on the Size and Structure of Cadmium Sulfide Nanocrystals Obtained by the Electrolytic Method [04035-1-04035-6]
36) Morphological Features of the Nanoporous Structure in the Ammonium Nitrate Granules at the Final Drying Stage in Multistage Devices [04036-1-04036-6]
37) On Theory of Superheterodyne FELs with Longitudinal Electrostatic Undulator [04037-1-04037-5]
38) Peculiarities of Magnetocaloric Effect in Ferromagnetic Cylindrical Nanowires with a Domain Wall [04039-1-04039-3]
