Tin Oxide Nanostructure Fabricated by Thermal Evaporation as Potential NO2 Sensor

Authors S.M. Ingole1,2, Y.H. Navale1, A.S. Salunkh1, M.A. Chougule1, G.D. Khuspe1, V.B. Patil1

1Functional Materials Research Laboratory, P.A.H. School of Physical Sciences, Solapur University, Solapur 413255, India

2Arts, Commerce and Science College Onde, Palghar 401605, India

Е-mail drvbpatil@gmail.com
Issue Volume 12, Year 2020, Number 2
Dates Received 15 February 2020; revised manuscript received 15 April 2020; published online 25 April 2020
Citation S.M. Ingole, Y.H. Navale, A.S. Salunkh, et al., J. Nano- Electron. Phys. 12 No 2, 02024 (2020)
DOI https://doi.org/10.21272/jnep.12(2).02024
PACS Number(s) 64.70.ph, 64.70.fm, 07.07.Df
Keywords SnO2 (6) , Thermal evaporation (10) , SEM (97) , AFM (14) , NO2 sensor.

Tin oxide (SnO2) gas sensor has been fabricated on glass substrate by using thermal evaporation and further characterize by scanning electron microscopy, atomic force microscopy and EDAX analysis for confirming its morphology and composition. The chemiresistive gas sensing performance of SnO2 films were studied towards various oxidizing and reducing gases. The experimental results reveal that, SnO2 films were vastly sensitive and selective towards NO2 gas than other test gases. SnO2 sensor exhibit maximum response of 160 % for 100 ppm NO2 gas with very fast response time at optimal operating 200 °C temperature. The SnO2 sensor manifests remarkably enhanced sensing performance, including fast response and recovery time, high sensitivity, and good stability, suggests of the promising application in the NO2 gas sensing field.

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