Formation and Physical Properties of Multicomponent Coatings Sputter-deposited from Co-Cr-Ni-Ti-Zr-Hf-Ta-W-C Segmented Target

Authors V.I. Perekrestov1, Yu.O. Kosminska1, , G.S. Kornyushchenko1, Yu.V. Gannych1, O. Gedeon2     

1Sumy State University, 2, Rymsky-Korsakov St., 40007 Sumy, Ukraine

2Institute of Chemical Technology, 5, Technicka St., CZ-16628 Prague 6, Czech Republic

Issue Volume 12, Year 2020, Number 1
Dates Received 11 November 2019; revised manuscript received 15 February 2020; published online 25 February 2020
Citation V.I. Perekrestov, Yu.O. Kosminska, et al., J. Nano- Electron. Phys. 12 No 1, 01005 (2020)
PACS Number(s) 68.55. – a, 81.15.Cd
Keywords Multicomponent coatings, Metal carbide coatings, Structure formation, Deposition by sputtering, Segmented target.   .

Multicomponent coatings were fabricated by sputtering of a rod target consisting of discs of various metals and carbon. The sputtering device used in this study has been developed by authors and represents modified dc magnetron sputtering with cathodic assembly in the form of a hollow cathode. A pipe is located coaxially to the sputtered rod target, and deposition takes place onto the inner surface of the pipe. In order to study structural and phase state and physical properties of the deposits, substrates are used which are placed along the pipe’s inner surface parallel to the rod target axis. For a set of elements of Co, Cr, Ni, Ti, Zr, Hf, Ta, W and carbon to build the segmented rod target, elemental composition of the corresponding coatings on the substrates was studied by means of EDXA. Elemental distribution revealed the formation of (TiTaW)C0.34, (TaTiWCrHf)C0.22, (WTaTiCrHfCo)C0.12, (CrWHfTaCoNiTiZr)C0.1, (CrHfWNiCoTaTi)C0.09 and (CrHfNiCoWTa)C0.08 coatings. From TEM, SEM and XRD studies it was concluded that the coatings structure varied from fine-dispersed polycrystalline to amorphous as carbon concentration increased. Along with it, as carbon concentration reached ~ 22 at. %, the surface roughness increased, solid solution of Ti, Ta, Hf, Cr, W carbidized, and microhardness increased up to 17 GPa. Finally, elemental composition of the coatings can be controlled by varying composition and geometry of the segmented rod target.

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