Formation and Physical Properties of Multicomponent Coatings Sputter-deposited from Co-Cr-Ni-Ti-Zr-Hf-Ta-W-C Segmented Target
| Authors | V.I. Perekrestov1, Yu.O. Kosminska1, , G.S. Kornyushchenko1, Yu.V. Gannych1, O. Gedeon2 |
| Affiliations |
1Sumy State University, 2, Rymsky-Korsakov St., 40007 Sumy, Ukraine 2Institute of Chemical Technology, 5, Technicka St., CZ-16628 Prague 6, Czech Republic |
| Е-mail | y.kosminska@phe.sumdu.edu.ua |
| Issue | Volume 12, Year 2020, Number 1 |
| Dates | Received 11 November 2019; revised manuscript received 15 February 2020; published online 25 February 2020 |
| Citation | V.I. Perekrestov, Yu.O. Kosminska, et al., J. Nano- Electron. Phys. 12 No 1, 01005 (2020) |
| DOI | https://doi.org/10.21272/jnep.12(1).01005 |
| PACS Number(s) | 68.55. – a, 81.15.Cd |
| Keywords | Multicomponent coatings, Metal carbide coatings, Structure formation, Deposition by sputtering, Segmented target. . |
| Annotation |
Multicomponent coatings were fabricated by sputtering of a rod target consisting of discs of various metals and carbon. The sputtering device used in this study has been developed by authors and represents modified dc magnetron sputtering with cathodic assembly in the form of a hollow cathode. A pipe is located coaxially to the sputtered rod target, and deposition takes place onto the inner surface of the pipe. In order to study structural and phase state and physical properties of the deposits, substrates are used which are placed along the pipe’s inner surface parallel to the rod target axis. For a set of elements of Co, Cr, Ni, Ti, Zr, Hf, Ta, W and carbon to build the segmented rod target, elemental composition of the corresponding coatings on the substrates was studied by means of EDXA. Elemental distribution revealed the formation of (TiTaW)C0.34, (TaTiWCrHf)C0.22, (WTaTiCrHfCo)C0.12, (CrWHfTaCoNiTiZr)C0.1, (CrHfWNiCoTaTi)C0.09 and (CrHfNiCoWTa)C0.08 coatings. From TEM, SEM and XRD studies it was concluded that the coatings structure varied from fine-dispersed polycrystalline to amorphous as carbon concentration increased. Along with it, as carbon concentration reached ~ 22 at. %, the surface roughness increased, solid solution of Ti, Ta, Hf, Cr, W carbidized, and microhardness increased up to 17 GPa. Finally, elemental composition of the coatings can be controlled by varying composition and geometry of the segmented rod target. |
|
List of References |
Other articles from this number
1) Mechanical Characterization of Electrodeposition of Ni-P Alloy Coating [01001-1-01001-5]2) New Biosensor Design Based on Photonic Crystal Core-shell Rods Defects for Detecting Glucose Concentration [01002-1-01002-4]
3) The Liebman Process for Distribution of the Information Flows of the Engine Automatic Control Systems [01003-1-01003-5]
4) Low-energy Electron Beam Profile Monitor [01004-1-01004-5]
5) Application of Additional Leveling Drift Process to Improve the Electrophysical Parameters of Large Sized Si (Li) p-i-n Structures [01006-1-01006-5]
6) Effect of Top Electrode Materials on Switching Characteristics and Endurance Properties of Zinc Oxide Based RRAM Device [01007-1-01007-6]
7) An Off-diagonal Feed Elliptical Patch Antenna with Ring Shaped Slot in Ground Plane for Microwave Imaging of Breast [01008-1-01008-4]
8) Optical Characterization of Chemically Reduced Silver Nanoparticles for Dye Sensitized Solar Cells [01009-1-01009-4]
9) Intensive Plastic Deformation Influence on Phase Relations of Cobalt Nanocrystals [01010-1-01010-6]
10) Influence of Correlated Coloured Noises on an Underdamped Josephson Junction [01011-1-01011-5]
11) Nanocarbon Materials of Plant Origin for Supercapacitors [01012-1-01012-6]
12) Structural-morphological and Conductive Properties of С-Al2O3 Composite Materials [01013-1-01013-6]
13) Diode Laser as an Electronic System of Surgical Influence on Soft Biological Tissues [01014-1-01014-4]
14) Gunn Diodes Based on Graded-gap GaInPAs [01015-1-01015-9]
15) Thermal Performance Enhancement of a Shallow Solar Pond Based on Nanofluids [01016-1-01016-5]
16) The Role of pH on Infrared Spectral, Structural and Morphological Properties of Room-temperature Precipitated CdS Nanoparticles [01017-1-01017-4]
17) Magnetocaloric Effect in Metamagnetic Shape Memory Alloy [01018-1-01018-4]
18) Growth and Properties of Cd-doped PbI2 Crystals [01019-1-01019-5]
19) An Analysis of Different Biopotential Electrodes Used for Electromyography [01020-1-01020-7]
20) Electronic Properties of Tetrataenite L10 FeNi at Earth’s Core Conditions [01021-1-01021-6]
21) Production, Structure and Properties of Coatings Based on Al2O3 Obtained by Magnetron Method [01022-1-01022-4]
22) Photovoltaic Characterization of Si and SiGe Surfaces Sonochemically Treated in Dichloromethane [01023-1-01023-4]
23) Junction Configuration Effect on the Performance of In2S3/CZTS Solar Cells [01024-1-01024-3]
24) Synthesis and Characterization of Ce-Fe Composite Nanoparticles via Sol-gel Method [01025-1-01025-3]
25) Background of Creation of New Memory Storage Unit of “Bit + Qubit” Type Based on Nanoscale Structural Inhomogeneities of Domain Walls Formed in Uniaxial Ferromagnetic Films [01026-1-01026-2]
26) Optical Properties of CdMnTe Film: Experimental and Theoretical Aspects [01027-1-01027-4]
