Ion Current Density Calculation of the Inductive Radio Frequency Ion Source
| Authors | V.I. Voznyi, V.E. Storizhko, V.I. Miroshnichenko, D.P. Shulha |
| Affiliations | Institute of Applied Physics NAS of Ukraine, 58, Petropavlivska Str., 40030 Sumy, Ukraine |
| Е-mail | vozny@ipflab.sumy.ua |
| Issue | Volume 4, Year 2012, Number 3 |
| Dates | Received 30 March 2012; revised manuscript received 17 September 2012; published online 30 October 2012 |
| Citation | V.I. Voznyi, V.E. Storizhko, V.I. Miroshnichenko, D.P. Shulha, J. Nano- Electron. Phys. 4 No 3, 03019 (2012) |
| DOI | |
| PACS Number(s) | 41.75.Ak, 52.50.Qt, 52.80.Pi |
| Keywords | RF ion source, Ion beam, Plasma (13) , Current density (4) . |
| Annotation |
A radio-frequency (RF) inductive ion source at 27.12 MHz is investigated. With a global model of the argon discharge, plasma density, electron temperature and ion current density of the ion source is calculated in relation to absorbed RF power and gas pressure as a discharge chamber size changes. It is found that ion beam current density grows as the discharge chamber size decreases. Calculations show that in the RF source with a discharge chamber 30 mm in diameter and 35 mm long the ion current density is 40 mA/cm2 at 100 W of absorbed RF power and 7 mTorr of pressure, and agrees well with experimentally measured value of 43 mA/cm2. With decreasing discharge chamber diameter to 15 mm ion current density can reach 85 mA/cm2 at absorbed RF power of 100 W. |
|
List of References |
Other articles from this number
1) Modelling of Vibration Sensor Based on Bimorph Structure [0-0]2) Chemical, Structural and Optical Properties of ē-Beam Evaporated Tungsten Diselenide Polycrystalline Thin Film [03001-1-03001-3]
3) Sol-Gel Deposited Porogen Based Porous Low-k Thin Films for Interlayer Dielectric Application in ULSI Circuits [03002-1-03002-3]
4) Structure and Surface Analysis of SHI Irradiated Thin Films of Cadmium Telluride [03003-1-03003-4]
5) Absorption Coefficients of GaN / AlxGa1 – xN Core-Shell Spherical Quantum Dot [03004-1-03004-5]
6) Preparation and Characterization of CuO Nanoparticles by Novel Sol-Gel Technique [03005-1-03005-4]
7) Helium Induced Structural Disorder in Hydrogenated Nanocrystalline Silicon (nc-Si:H) Thin Films Prepared by HW-CVD Method [03006-1-03006-7]
8) Effect of Gate Length Scaling on Various Performance Parameters in DG-FinFETs: a Simulation Study [03007-1-03007-6]
9) Physical Properties and Structure of Sodium Stearate Thin Films (С17Н35СООNa) [03008-1-03008-5]
10) Investigation of the Nanoparticles Motion Modes within the Framework of Stochastic System [03009-1-03009-6]
11) Modeling Diffusion Interaction in the bi-Phase Systems with Using Different Types of the Effective Kinetic Coefficients [03010-1-03010-9]
12) Nucleation Processes at Condensation of Amorphous Chalcogenide Semiconductor Films [03011-1-03011-7]
13) Switching Time of Magnetic Moment Driven by Circularly Polarized Field [03012-1-03012-6]
14) Ostwald Ripening of Diffusion-Limited Small-Size Precipitates at Grain Boundaries [03013-1-03013-9]
15) Effect of Annealing on the Optical Properties and the Refractive Index Dispersion of CdS Nanometer Films [03014-1-03014-4]
16) Cluster beam sources. Part 1. Methods of cluster beams generation [03015-1-03015-13]
17) Influence of Substrate on Magnetoresistive and Magneto-Optical Properties of Co/Fe Film System [03016-1-03016-6]
18) Influence of Intercalation Cobalt on Properties of Layered Crystals In2Se3 [03017-1-03017-4]
19) Simulation of the Probe Formation Processes in the Separated Systems of Magnetic Quadrupole Lenses [03018-1-03018-5]
20) Tensoresistive Properties of Thin Film Systems Based on Ag and Co [03020-1-03020-4]
21) Migration of Impurities in the Structure of Graphene [03021-1-03021-5]
22) Design Numerical Method for Nonsingular Invisibility Cloak-Carpet with Arbitrary Shapes [03022-1-03022-5]
23) Decoding of the Spatial Distribution of Ionizing Radiation Sources in Systems with Coded Apertures [03023-1-03023-5]
24) Relaxation Time of the Particle Beam with an Anisotropic Velocity Distribution [03024-1-03024-3]
25) Photodetectors on the Basis of Porous Silicon [03025-1-03025-5]
26) The Asymmetry of the Distribution Density Volume Uncompensated Charge at the Metallurgical p-n Junction [03026-1-03026-4]
27) Calculation of the Point Defects Ensemble in Zinc Sulfide Single Crystals and Films [03027-1-03027-6]
28) Longitudinal Magnetic Field Effect on Wave Dynamics in Multiharmonic Superheterodyne FEL of Dopplertron Type with Helical Electron Beam [0-0]
