Nucleation Processes at Condensation of Amorphous Chalcogenide Semiconductor Films
| Authors | A.V. Dalekorey1, V.P Ivanitsky1, V.S. Kovtunenko2 , R.O. Meshko1 |
| Affiliations | 1 Uzhgorod National University, 46, Pidgirna Str., 88000, Uzhgorod, Ukraine 2 Cherkask State Technological University, 460, Shevchenko Ave., 18006, Cherkasy, Ukraine |
| Е-mail | toljadal@yandex.ru, ivanc@mail.uzhgorod.ua |
| Issue | Volume 4, Year 2012, Number 3 |
| Dates | Received 15 February 2012; published online 30 October 2012 |
| Citation | English version unavailable |
| DOI | |
| PACS Number(s) | 64.60.qj, 68.03.Fg |
| Keywords | Condensation mechanism, Amorphous films, Island films, Mass-spectrometry. |
| Annotation |
The initial stages of nucleation of amorphous chalcogenide semiconductor films were investigated theoretically and experimentally. The important role of the complex mass spectrometry of the vapor phase in the process of nucleation and growth of amorphous chalcogenides island on uniform substrate surface was found. |
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List of References English version of article |
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