Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings
| Authors | I.V. Sudzhanskaya1 , А.I. Poplavsky1, I.Yu Goncharov1, O.V. Glukhov2 |
| Affiliations | 1 Belgorod State University, 85, Pobedy Str., 308015 Belgorod, Russia 2 National University of Radioelectronics, 14, Science Boulevard, 61166 Kharkov, Ukraine |
| Е-mail | |
| Issue | Volume 9, Year 2017, Number 6 |
| Dates | Received 15 September 2017; published online 24 November 2017 |
| Citation | I.V. Sudzhanskaya, А.I. Poplavsky, I.Yu Goncharov, O.V. Glukhov, J. Nano- Electron. Phys. 9 No 6, 06027 (2017) |
| DOI | 10.21272/jnep.9(6).06027 |
| PACS Number(s) | 68.55.aj, 68.37.Ps |
| Keywords | Carbon films, Electrical capacity, Conductivity (43) , Morphology surface. |
| Annotation | Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed. |
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List of References |
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