Multilayer Nitride Coatings (TiZrNbHf)N/MoN

Authors D.A. Kolesnikov1 , U.S. Nyemchenko2, V.M. Beresnev2 , O.V. Sobol′3, V.A. Novikov1, S.V. Lytovchenko2 , V.A. Stolbovoi4, I.Yu. Goncharov1 , P.V. Turbin5, L.V. Malikov5

1 Belgorod State National Research University, 85, Peremohy st., 308015 Belgorod, Russia

2 V.N. Karazin Kharkiv National University, 4, Svobody sq., 61022 Kharkiv, Ukraine

3 National Technical University «Kharkiv Polytechnic Institute», 21, Kyrpychova st., 61002 Kharkiv, Ukraine

4 National Science Center «Kharkiv Institute of Physics and Technology», 1, Akademichna st., 61108 Kharkiv, Ukraine

5 Science Center of Physics and Technology of MES and NAS of Ukraine, 6, Svobody sq., 61022 Kharkiv, Ukraine

Issue Volume 8, Year 2016, Number 3
Dates Received 28 May 2016; published online 03 October 2016
Citation D.A. Kolesnikov, U.S. Nyemchenko, V.M. Beresnev, et al., J. Nano- Electron. Phys. 8 No 3, 03045 (2016)
DOI 10.21272/jnep.8(3).03045
PACS Number(s) 61.46. – w, 62.20.Qp, 62-65. – g
Keywords Vacuum-arc deposition (4) , High entropy alloys, Multilayer nitride coatings, Physical and mechanical properties of coatings.

It is shown that at low negative bias potential applied to the substrate during the deposition (Ub lesser than 150 V), a two-phase state with the preferred orientation of crystallites can be reached for the multilayer coatings with the thickness of layers of 50 nm. This causes high hardness (up to 59 GPa) and high adhesion strength at the same time (critical load reaches 124.9 N). Low wear resistance of the coatings in contact with the counterbody of Al2O3 is observed.

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