Ion Current Density Calculation of the Inductive Radio Frequency Ion Source

Authors V.I. Voznyi, V.E. Storizhko, V.I. Miroshnichenko, D.P. Shulha

Institute of Applied Physics NAS of Ukraine, 58, Petropavlivska Str., 40030 Sumy, Ukraine

Issue Volume 4, Year 2012, Number 3
Dates Received 30 March 2012; revised manuscript received 17 September 2012; published online 30 October 2012
Citation V.I. Voznyi, V.E. Storizhko, V.I. Miroshnichenko, D.P. Shulha, J. Nano- Electron. Phys. 4 No 3, 03019 (2012)
PACS Number(s) 41.75.Ak, 52.50.Qt, 52.80.Pi
Keywords RF ion source, Ion beam, Plasma (13) , Current density (4) .
A radio-frequency (RF) inductive ion source at 27.12 MHz is investigated. With a global model of the argon discharge, plasma density, electron temperature and ion current density of the ion source is calculated in relation to absorbed RF power and gas pressure as a discharge chamber size changes. It is found that ion beam current density grows as the discharge chamber size decreases. Calculations show that in the RF source with a discharge chamber 30 mm in diameter and 35 mm long the ion current density is 40 mA/cm2 at 100 W of absorbed RF power and 7 mTorr of pressure, and agrees well with experimentally measured value of 43 mA/cm2. With decreasing discharge chamber diameter to 15 mm ion current density can reach 85 mA/cm2 at absorbed RF power of 100 W.

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