An Improved SPICE Model for MEMS Based Capacitive Accelerometers
| Authors | C. Kavitha, M. Ganesh Madhan |
| Affiliations | Department of Electronics Engineering, Anna University, M.I.T Campus, 600 044 Chennai, India |
| Е-mail | kaviphd2011@yahoo.co.in, mganesh@annauniv.edu |
| Issue | Volume 5, Year 2013, Number 2 |
| Dates | Received 15 February 2013; revised manuscript received 29 April 2013; published online 04 May 2013 |
| Citation | C. Kavitha, M. Ganesh Madhan, J. Nano- Electron. Phys. 5 No 2, 02011 (2013) |
| DOI | |
| PACS Number(s) | 85.85. + jх |
| Keywords | Squeezed film, Capacitive accelerometer, Thermal effect, Damping, Electrical attractive force. |
| Annotation | An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator. |
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