Laser Scribing Optimization of RF Magnetron Sputtered Molybdenum Thin Films
| Автори | V.B. Padhiar1, A.L. Patel2, J.R. Ray1 , M.S. Desai1 , C.J. Panchal1 |
| Приналежність | 1 Department of Applied Physics, M.S. University of Baroda, Vadodara – 390001, Gujarat India 2 Director, Sahjanand Laser Technology Ltd., E-30, G. I.D.C. Electronics Estate, Sector 26, Ghandhinagar-382 028, Gujarat, India |
| Е-mail | cjpanchal_msu@yahoo.com, arvindp@sahajanandlaser.com |
| Випуск | Том 3, Рік 2011, Номер 1, Part 1 |
| Дати | Received 04 February 2011, published online 22 March 2011 |
| Посилання | V.B. Padhiar, A.L. Patel, J.R. Ray, et al., J. Nano- Electron. Phys. 3 No1, 9 (2011) |
| DOI | |
| PACS Number(s) | 42.62.Cf, 73.61.At |
| Ключові слова | Laser scribing, Molybdenum thin film (2) , Laser power, Pulse frequency, Scribe line width. |
| Анотація |
The optimization process of laser scribing of back contacts is carried out by varying different parameters of laser and thickness of Molybdenum (Mo) thin-films. Mo thin films were deposited by RF magnetron sputtering on the organically cleaned soda lime glass substrate. The thickness of Mo was in the range of 60 nm to 800 nm. For the scribing process the laser power and the laser pulse frequency were varied. Different thickness of Mo shows the different scribe behavior. The optimized process provides a successful isolative laser scribing, having a minimum scribe line width, of Mo layer on glass substrate without any presence of walls, ridges, or collars in scribed areas. |
|
Перелік посилань |
Інші статті цього номера
1) The Study of Microstructure of III-V Polar on Non-Polar Heterostructures by HRXRD [0017-0025]2) Enhancement of NMP Degradation Under UV Light by Nitrogen-Doped TiO2 Thin Films Using a Design of Experiment [0026-0040]
3) Effect of Substrate Temperature on Structural and Morphological Parameters of ZnTe Thin Films [0041-0046]
4) Low Temperature Synthesis and Characterization of ZnTiO3 by Sol-Gel Method [0047-0052]
5) A Simple Sol-Gel Protocol Towards Synthesis of Semiconducting Oxide Nanomaterial [0053-0058]
6) Synthesis and Characterization of Co-Doped SnO2/TiO2 Semiconductor Nano Crystallites via Sol-Gel Method [0059-0066]
7) A Strategic Review of Reduction of Dislocation Density at the Heterogenious Junction of GAN Epilayer on Foreign Substrate [0067-0084]
8) Effect of PH on the Physical Properties of ZnIn2Se4 Thin Films Grown by Chemical Bath Deposition [0085-0091]
9) Synthesis and Characterization of Undoped and Co-Doped SnO2 Nanoparticles [0092-0100]
10) Substrate Temperature Effect on Structural Properties of Bi2Te3 Thin Films [0101-0105]
11) Deposition and Surface Modification of Low-K Thin Films for ILD Application in ULSI Circuits [0106-0110]
12) Synthesis and Characterisation of CdxZn1–xS Nanocomposites [0111-0116]
13) Structure, Optical and Electrical Characterization of Tin Selenide Thin Films Deposited at Room Temperature Using Thermal Evaporation Method [0117-0126]
14) Nano-Scale Patterning of Silicon Nanoparticles on Silicon Substrate by DIP-PEN-Nanolithography [0127-0131]
15) Synthesis and Characterization of ZnO Nanoparticles [0132-0139]
16) Fabrication of ZnxCd1–xSe Nanowires by cvd Process and Photoluminescence Studies [0140-0145]
17) Template Assisted Growth of Zinc Oxide-Based Nanowires by Electrochemical Deposition [0146-0150]
18) Kinetics Study of (Se80Te20)100-xCdx Glassy Alloy by Differential Thermal Analysis Using Non-Isothermal Technique [0151-0154]
19) A study of the evolution of the silicon nanocrystallites in the amorphous silicon carbide under argon dilution of the source gases [0155-0161]
20) Effects of Interfacial Charges on Doped and Undoped HfOx Stack Layer with Tin Metal Gate Electrode for Nano-Scaled CMOS Generation [0162-0169]
21) Oxide Nanostructures: Characterizations and Optical Bandgap Evaluations of Cobalt-Manganese and Nickel-Manganese at Different Temperatures [0170-0178]
22) Synthesis and Characterization of Novel Nanocrystalline Zirconium (IV) Tungstate Semiconductor [0179-0184]
23) Effect of Annealing on Structure, Morphology, Electrical and Optical Properties of Nanocrystalline TiO2 Thin Films [0185-0192]
24) Study on Nanoparticles of ZnSe Synthesized by Chemical Method and Their Characterization [0193-0202]
25) MOCVD of Cobalt Oxide Using Co-Actylacetonate as Precursor: Thin Film Deposition and Study of Physical Properties [0203-0211]
