The Design of a Low Power MEMS Based Micro-hotplate Device Using a Novel Nickel Alloy for Gas Sensing Applications

Authors Bijoy Kantha, Subir Kumar Sarkar

Jadavpur University, 188, Raja S. C. Mullick Road, Kolkata – 700032 West Bengal, India

Issue Volume 6, Year 2014, Number 1
Dates Received 01 October 2014; published online 06 April 2014
Citation Bijoy Kantha, Subir Kumar Sarkar, J. Nano- Electron. Phys. 6 No 1, 01004 (2014)
PACS Number(s) 44.10. + i, 73.50.Lw, 62.20. – x
Keywords MEMS (7) , Micro-hotplate, CoventorWareTM, Electro-thermo-mechanical, ZnO (89) .
Annotation In this paper comparative analysis of MEMS (Micro-electro-mechanical System) based Micro-hotplate using three different heating elements use as separately are presented. Three different materials (viz. DilverP1, Polysilicon, and Platinum) are used as heating elements with same thickness of 0.2 µm. CoventorWareTM simulator has been used for construction of 3D model and electro-thermo-mechanical analysis of Micro-hotplate device. Power consumption, stress and displacement of Micro-hotplate are studied at operating temperature (165 ºC). It is obtained that power consumption, stress and displacement of Dilverp1 heating element are 13.06 mW, 190 MPa and 0.028 µm which are less in comparison to those with Poly Silicon heater and Platinum heater at moderate temperature (150-200 °C) over the sensing material (ZnO).

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