Angular Ellipsometry of Porous Silicon Surface Layers
| Authors | L.V. Poperenko , S.G. Rozouvan, I.V. Yurgelevych , P.O. Lishchuk |
| Affiliations |
Taras Shevchenko National University of Kyiv, 64/13, Volodymyrska St., 01601 Kyiv, Ukraine |
| Е-mail | vladira_19@ukr.net |
| Issue | Volume 12, Year 2020, Number 3 |
| Dates | Received 03 February 2020; revised manuscript received 15 June 2020; published online 25 June 2020 |
| Citation | L.V. Poperenko, S.G. Rozouvan, I.V. Yurgelevych, P.O. Lishchuk, J. Nano- Electron. Phys. 12 No 3, 03024 (2020) |
| DOI | https://doi.org/10.21272/jnep.12(3).03024 |
| PACS Number(s) | 78.68. + m, 81.05.Rm |
| Keywords | Porous silicon (3) , Optical properties (22) , Oxidation (4) , Film (136) , Ellipsometry (5) . |
| Annotation |
An ellipsometric diagnostics of porous silicon samples with different degree of porosity P was carried out. The porous silicon samples with degree of porosity of 30 % and 60 % were fabricated on (100) silicon wafers of p-type conductivity with a high concentration of boron dopant by etching in solution of HF and ethanol. To characterize the optical properties of porous silicon samples the angular dependences of such ellipsometric parameters as D (cosD) and Y (tgY) were measured within a wide range of light incidence angles. Due to their angular dependences the principal angle jp of light incidence and a value of tgYmin and its angular position were determined. The optical properties of the samples of porous silicon with different degree of porosity after keeping in isopropyl alcohol during one day were also studied. The morphology of the porous silicon surface was investigated by atomic force microscopy. It was found that the ellipsometric parameters are significantly different for these two samples of porous silicon with different degree of porosity P, namely the differences in the value of the principal angle of light incidence and the angular position of the tgY minimum are about 10°. In the framework of the model of the effective medium the obtained result was explained by the presence in porous silicon sample with P = 60 % of larger amount of a substance with small refractive index, namely air and silicon oxide formed on the walls of its pores. It was established that treatment of the samples of porous silicon in isopropyl alcohol during one day and subsequent keeping of samples in air atmosphere leads to a decrease in the principal angle of light incidence and refractive index due to porous silicon oxidation. |
|
List of References |
Other articles from this number
1) Beam and Sector Modes of Electron Fluxes in Cylindrical Magnetic Field of Magnetron Gun [03001-1-03001-5]2) Theoretical Investigation on Improvement of CIGS-based Solar Cells [03002-1-03002-5]
3) Enhancement of Performance of a-Si:H Solar Cells by Introducing a p-nc-SiOx:H Nanostructure Buffer Layer [03003-1-03003-5]
4) Optical Extraction Efficiency for External Cavity Quantum Cascade Lasers [03004-1-03004-5]
5) Numerical Simulation of FinFET Transistors Parameters [03005-1-03005-4]
6) Numerical Simulation of Temperature and Electric Field Distributions in the Microwave Heating of Petroleum Coke [03006-1-03006-5]
7) Nanostructured ZnO and CuI Thin Films on Poly(Ethylene Terephthalate) Tapes for UV-Shielding Applications [03007-1-03007-8]
8) Mechanisms of Changing the Conductivity of Porous Silicon in an Ammonia Atmosphere – DFT Modeling [03008-1-03008-7]
9) Elaboration of Copper Zinc Ferrite Nanoparticles: Application in Catalytic Wet H2O2 Oxidation of Phenol [03009-1-03009-5]
10) Characterization of Spin Coated Tin Oxide Thin Films for Optoelectronic Applications [03010-1-03010-5]
11) Investigation on Electrical and Structural Properties of Manganese Dioxide Nanoparticles [03011-1-03011-5]
12) On Temperature Dependence of Longitudinal Electrical Conductivity Oscillations in Narrow-gap Electronic Semiconductors [03012-1-03012-5]
13) Influence of Laser Radiation on Optical Properties of High Resistivity CdTe Crystals and Cd1 – xZnxTe Solid Solutions in the Field of the Fundamental Optical Transition E0 [03013-1-03013-4]
14) Electric Properties of MCM-41 SmCl3 Nanohybrid Encapsulate [03014-1-03014-5]
15) Deep Silicon Barrier Structure as Chemical Sensor for Detection of Hydrochloric Acid Salt Solutions [03015-1-03015-5]
16) ZnO Growth on Macroporous Si Substrates by HF Magnetron Sputtering [03016-1-03016-4]
17) Single Electron Transistor Based on Endohedral Metallofullerenes Me@C60 (Me = Li, Na, K) [03017-1-03017-5]
18) RMS Dynamic Displacements of Atoms and Their Complexes from the Equilibrium Position in Crystals [03018-1-03018-5]
19) Liquid Phase Deposition of TiO2 Films for Electron Transport Layer of Perovskite Solar Cells [03019-1-03019-5]
20) The Radiation Peculiarities of Nanoscale SnO2 in a Porous Matrix [03020-1-03020-4]
21) Modelling Spatial Characteristics of Silicon Solar Cell: Artificial Neural Network Approach [03021-1-03021-4]
22) Study of Coherent Properties of an Exciton in Semiconductor Quantum Dots [03022-1-03022-6]
23) Effect of Fe-incorporation on Structural and Optoelectronic Properties of Spin Coated p/n Type ZnO Thin Films [03023-1-03023-6]
24) Bioactive Polymer-apatite Coatings with Antimicrobial Properties on Model Titanium Implants [03025-1-03025-5]
25) Influence of Constant Magnetic Field on Mechanical Properties and Thermal Stability of the Amorphous Alloys Based on Co, Fe and Ni [03026-1-03026-4]
26) Optimization of the Electrical Characteristics of the Au/n-type InN/InP Schottky Diode Based on the Contact Technique of Different Diameters [03027-1-03027-6]
27) Green Function Method for Ferromagnetic Superlattice Nanotubes [03028-1-03028-4]
28) Hopping Conductivity Mechanism in Cd3As2 Films Prepared by Magnetron Sputtering [03029-1-03029-4]
29) Synthesis and Electrochemical Properties of Mesoporous α-MnO2 for Supercapacitor Applications [03030-1-03030-4]
30) Third-order Nonlinear Dispersion Properties of Surface Plasmon Resonance in Gold Nanoparticles [03031-1-03031-6]
31) Electroconductive and Polarization Properties of Inorganic-organic MCM-41 (PTHQ) Encapsulant [03032-1-03032-5]
32) Biosensors: Design, Classification and Application [03033-1-03033-9]
33) Electrical Conductivity and Magnetoresistive Properties of Film Alloys Based on Permalloy Fe0.5Ni0.5 and Copper [03034-1-03034-4]
34) The Influence of the Phase Composition of the B-N-C System Composite Material on Its Physical-mechanical and Tribological Characteristics [03035-1-03035-5]
35) Model of Tunneling Current on Bilayer Armchair Graphene Nanoribbon Tunnel Field Effect Transistor Using Transfer Matrix Method [03036-1-03036-5]
36) Investigation of the Electrophysical Influence on the Antiwear Properties of Hydrocarbon Liquids [03037-1-03037-6]
37) Calculation of Physicochemical Conditions of the Formation of Protective Coatings Based on Carbides and Nitrides of Chromium [03038-1-03038-4]
38) Structural and Phase Elemental Distribution in Pulsed Plasma Coating Deposited with Cemented Carbide Cathode [03039-1-03039-6]
39) Analysis of the Dynamic and Structural Characteristics’ Behavior in NaCl Single Crystals Pre-deformed and Х-ray Irradiated [03040-1-03040-3]
