The Analysis of Elemental Composition and Depth Profiles of Nitride Nanostructured Coating Based on the TiHfVNbZr High-entropy Alloy
| Authors | A.A. Bagdasaryan1, E. Smirnova1, P. Konarski2 , M. Miśnik2, A. Zawada3 |
| Affiliations | 1 Sumy State University, 2, Rimsky-Korsakov Str., 40007 Sumy, Ukraine 2 Institute of Tele and Radio Technology, 11, Ratuszowa Str., Warszawa, Poland 3 Gdansk University of Technology, 11/12, Gabriela Narutowicza Str., Gdansk, Poland |
| Е-mail | artemsumdu@ukr.net |
| Issue | Volume 6, Year 2014, Number 2 |
| Dates | Received 26 May 2014; published online 20 June 2014 |
| Citation | A.A. Bagdasaryan, E. Smirnova, P. Konarski, et al., J. Nano- Electron. Phys. 6 No 2, 02028 (2014) |
| DOI | |
| PACS Number(s) | 81.05.Je, 81.70.Jb |
| Keywords | High-entropy alloy, Nitride coating, Depth profiles, Elemental composition (2) , Ion beam technique. |
| Annotation | The elemental and structural features of the nitride nanostructured coating produced by vacuum arc evaporation from high-entropy cathode TiHfVNbZr were studied. Using of the complementary methods of elemental analysis (RBS, SIMS and GDMS) allowed to carry out a comprehensive analysis of the elemental composition, namely to determine the chemical composition of the surface layer, to establish the characteristics of the distribution of elements in depth and to identify uncontrollable impurities. |
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List of References English version of article |
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