Discharge System With Electron Oscillations in the Emission Region for the Positive Ion Source

Authors P.A. Litvinov, V.A. Baturin
Affiliations Institute of Applied Physics, National Academy of Sciences of Ukraine, 58, Petropavlivs’ka Str., 40030, Sumy, Ukraine
Е-mail [email protected]
Issue Volume 1, Year 2009, Number 2
Dates Received 25 August 2009, in final form 18 September 2009
Citation P.A. Litvinov, V.A. Baturin, J. Nano- Electron. Phys. 1 No2, 48 (2009)
PACS Number(s) 82.33.Xj, 29.25.Ni
Keywords Discharge chamber, Glow discharge, Positive ions, Ion beam, Ion source.
Design of the discharge system with electron oscillations in the emission region for the positive ion source was studied. Realization of the conditions for electron oscillation in the emission region of the electrode system allowed to increase the energy efficiency of a glow discharge. Obtained characteristics of the discharge with electron oscillation in the emission region of the discharge chamber allow to conclude about possibility of its application in the positive ion source operating at low pressure in the discharge chamber.

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