Modeling and Optimization of CMOS Compatible Various ZnO/SiO2/Si Multilayer Structure for SAW Devices Using FEM
| Authors | P.R. Bagade1, A.J. Pawar2, R.K. Kamat2 , S.A. Shinde2 |
| Affiliations |
1Department of Electronics, Vivekanand College, (Autonomous) Kolhapur, Maharashtra, India 2Department of Electronic, Shivaji University, Kolhapur, Maharashtra, India |
| Е-mail | pravinbagade333@gmail.com |
| Issue | Volume 15, Year 2023, Number 1 |
| Dates | Received 05 December 2022; revised manuscript received 18 February 2023; published online 24 February 2023 |
| Citation | P.R. Bagade, A.J. Pawar, R.K. Kamat, et al., J. Nano- Electron. Phys. 15 No 1, 01024 (2023) |
| DOI | https://doi.org/10.21272/jnep.15(1).01024 |
| PACS Number(s) | 07.10.Cm, 68.35.Iv |
| Keywords | SAW device (2) , Finite element method (FEM) (3) , MEMs (8) , Interdigital transducer (IDT) (2) . |
| Annotation |
This article presents a design, modeling and optimization of Surface Acoustic Wave (SAW) resonator with CMOS compatible piezoelectric crystal material and characterized for wireless 915 MHz ISM frequency band. Simulation study for the realization of SAW resonator based on CMOS compatible piezoelectric thin film of Zinc oxide (ZnO) on passivated silicon (SiO2/Si) substrate is performed. The SAW properties of ZnO film on SiO2/Si were analyzed with three composite structures as (IDT)/ZnO/SiO2/Si, ZnO/(IDT)/ZnO/SiO2/Si, and ZnO/(IDT)/SiO2/Si using COMSOL Multiphysics Software. The properties of ZnO/(IDT)/SiO2/Si structure revealed good SAW properties such as maximum coupling coefficient and acoustic velocity compared to other structures. The effects of piezoelectric Zinc oxide (ZnO) layer, interdigital transducer (IDT) materials, and SiO2 thin film thickness on the evolution of the phase velocity and electromechanical coupling coefficient (K2) were studied by employing a finite element method. The design and simulations of multilayered SAW structure carried out for 915 MHz and ZnO/(IDT)/SiO2/Si structure provide excellent overall performance. |
|
List of References |
Other articles from this number
1) Laser-Induced Modification of the Morphology and Defect Structure of Heterostructures Based on Detector-Grade CdTe Crystals [01001-1-01001-6]2) Electrical Conductivity of Composite Materials Based on n-InSe and Thermally Expanded Graphite [01002-1-01002-4]
3) Reliability and Availability Analysis of Lithium-Ion Batteries under Multiple Failures [01003-1-01003-5]
4) Three-Stepped Septum Waveguide Polarizer in the Operating Frequency Band 7.7-8.1 GHz [01004-1-01004-5]
5) A Comparative Study of the Structural and Magnetic Properties of Arc-Melted and Ball-Milled Fe1 – xAlx Alloys [01005-1-01005-5]
6) The Influence of Physical Quantities on Electrical Parameters of Heterometallic -Methoxy (Copper (II), Bismuth (III)) Acetylacetonate [01006-1-01006-5]
7) New Technologies of Laser Hardening of Parts of Fuel Equipment [01007-1-01007-7]
8) High-Performance Two-Dimensional Photonic Crystal Biosensor to Diagnose Malaria Infected RBCs [01008-1-01008-6]
9) Numerical Investigation Including Mobility Model for the Performances of Piezoresistive Sensors [01009-1-01009-4]
10) Synthesis of Thin Films Based on Silver Sulfide in Air at Atmospheric Pressure in a Gas Discharge [01010-1-01010-6]
11) Planar n+-n-n+ Diode with Active Side Boundary on InP Substrate [01011-1-010011-4]
12) Lattice Dynamics and Lattice Mechanical Properties of Gold and Silver Using Parameter Free Pseudopotential [01012-1-01012-5]
13) Physical and Technological Parameters of Cr28 Steel Nitriding in an Ammonia Environment [01013-1-01013-4]
14) Optical Absorption of a Composite Based on Two-Layer Nanowires [01014-1-01014-6]
15) Influence of Annealing Temperature on the Structural and Optical Properties of Tellurium-Doped ZnO Thin Films for Optoelectronic Applications [01015-1-01015-5]
16) Magnetic Nanoparticles as Controlling Agents of Chain Structures in a Rotating Magnetic Field [01016-1-01016-6]
17) Analysis of Power Supply Voltage Drop (IR-Drop) and Propagation Delay Using Folded Graphene Nano Ribbon Interconnect (F-GNR) Interconnect [01017-1-01017-5]
18) Structural and Electronic Properties of FeNi3 and FeNi2Pt Alloys [01018-1-01018-5]
19) Effects of Boron Diffusion on Titanium Silicide Formation [01019-1-01019-5]
20) Effect of Temperature on the Performance of CGS/CIGS Tandem Solar Cell [01020-1-01020-6]
21) Photovoltaic Properties of Silicon Doped with Manganese and Germanium [01021-1-01021-4]
22) Effect of Idealization Models on Deflection of Functionally Graded Material (FGM) Plate [01022-1-01022-5]
23) Improving the Electrical Properties of ITO/Si/GaAs/Si/ITO Solar Cell by Changing the GaAs Layer Position [01023-1-01023-4]
24) A Low-profile Wideband Two Ports MIMO Antenna Working at 38 GHz for mm-wave 5G Applications [01025-1-01025-5]
25) A Compact Multi-resonant Wide Band MIMO Antenna for 5G Communication Systems at mm-wave Band [01026-1-01026-6]
26) A Compact Two-port MIMO Array Antenna for ISM/5G NR/WLAN Band Applications [01027-1-01027-5]
27) A Miniaturized Wearable Textile UWB Monopole Antenna for RF Energy Harvesting [01028-1-01028-6]
28) Justification of the Giant Magnetoresistance Effect in Co/Cu/Co and Fe/Cr/Fe Magneto-Ordered Three-Layer Structures by Using the Fuchs Formula [01029-1-01029-5]
29) Dielectric Properties of the Low-temperature Phase Transitions in Divalent Nitrates [01030-1-01030-3]
30) Персоналії. Проценко Іван Юхимович [01031-1-01031-1]
