Effect of the Type of Electrolyte Аnion on the Porous InP Morphology Obtained by the Electrochemical Etching

Authors Ya.A. Suchikova1 , V.V. Kidalov1 , G.A. Sukach2

1 Berdyansk State Pedagogical University, 4, Shmidta Str., 71100, Berdyansk, Ukraine

2 V.Lashkaryov`s Institute of Semiconductor Physics NASU, 41, Pr. Nauki, 03028, Kiev, Ukraine

Е-mail V.V.Kidalov@mail.ru
Issue Volume 1, Year 2009, Number 4
Dates Received 05.11.2009, in final form 01.12.2009
Citation Ya.A. Suchikova, V.V. Kidalov, G.A. Sukach, J. Nano- Electron. Phys. 1 No4, 111 (2009)
PACS Number(s) 61.43.Gt, 78.30.Fs, 78.55.m
Keywords Porous InP, Electrochemical etching, Scanning electron microscopy (16) , Nanostructures (8) , Threshold voltage (15) .
In this work the analysis of the dependence of the porous InP morphology on the type of reacting anion is presented. It is shown that nanoporous InP layers are obtained under certain conditions of electrochemical etching.

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