Ellipsometric Characterization of SiO2/Au/Cr Nanostructures for Stable SPR Sensors
| Authors | I. Minailova1, O. Ivakhno-Tsehelnyk2, P. Shamrovska2, A. Fedorenko1, N. Kachur1, I. Matyash1, V. Maslov1, D.R.T. Zhan2 |
| Affiliations |
1V. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine, Kyiv, Ukraine 2Semiconductor Physics and Center for Materials, Architectures, and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, D-09107 Chemnitz, Germany
|
| Е-mail | irinaminailova125@gmail.com |
| Issue | Volume 18, Year 2026, Number 3 |
| Dates | Received 04 April 2026; revised manuscript received 23 June 2026; published online 26 June 2026 |
| Citation | I. Minailova, O. Ivakhno-Tsehelnyk, et al., J. Nano- Electron. Phys. 18 No 3, 03011 (2026) |
| DOI | https://doi.org/10.21272/jnep.18(3).03011 |
| PACS Number(s) | 07.60.Fs, 73.20.Mf |
| Keywords | Spectroscopic ellipsometry, Surface plasmon resonance, Optical constants (10) , Sol-gel method (4) , Nanostructures (8) , Gold (8) , Silicon dioxide. |
| Annotation |
In this research, the optical characteristics of a multilayer nanostructure SiO2(5 nm)/Au(50 nm)/Cr(5 nm)/glass, designed for stable surface plasmon resonance (SPR) sensors, were investigated. Multi-angle spectroscopic ellipsometry was employed at angles of 50°, 60°, and 70° to precisely analyze the spectral dependences of the ellipsometric parameters Ψ and Δ over a wide wavelength range from 300 to 1500 nm. While the metal layers (Cr and Au) were deposited by vacuum thermal evaporation, the silicon dioxide protective layer was formed using the sol-gel method followed by thermal annealing at 400 °C.The study established that the deposition of the 5 nm SiO2 layer causes a characteristic modification of the Ψ() and Δ() spectra, reflecting the dielectric contribution of the coating without degrading the metallic properties of the gold film. Numerical simulations based on the verified optical model showed that the introduction of the protective layer results in a minor SPR resonance shift of approximately 0.5° at the operating wavelength of 633 nm. Importantly, the high-quality factor and sensitivity of the resonance are preserved. The results confirm that the sol-gel derived SiO2 nanolayer effectively stabilizes the sensor surface against environmental degradation while maintaining its optimal functional performance, making it a promising candidate for durable SPR-based sensing applications. |
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List of References |
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