Research of Microhardness of Thin Ceramic Coatings Formed by Combined Electron-beam Method on Dielectric Materials
| Authors | V.S. Antonyuk1, Yu.Yu. Bondarenko2, S.O. Bilokin’2, V.O. Andrienko2, M.O. Bondarenko2 |
| Affiliations |
1National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute", 37, Peremogy Ave, 03056 Kyiv, Ukraine 2Cherkasy State Technological University, 460, Shevchenko Blvd., 18030 Cherkasy, Ukraine |
| Е-mail | |
| Issue | Volume 11, Year 2019, Number 6 |
| Dates | Received 22 June 2019; revised manuscript received 01 December 2019; published online 13 December 2019 |
| Citation | V.S. Antonyuk, Yu.Yu. Bondarenko, et al., J. Nano- Electron. Phys. 11 No 6, 06024 (2019) |
| DOI | https://doi.org/10.21272/jnep.11(6).06024 |
| PACS Number(s) | 42.79.Bh |
| Keywords | Ceramic coatings, Dielectric (25) , Silicon (58) , Microhardness (2) , Electron beam modification, Atomic force microscopy (9) . |
| Annotation |
The peculiarities of obtaining thin ceramic coatings (TiO2 + Al2O3, Al2O3, ZrO2) on the surfaces of dielectrics (on the example of Kr1 silicon) during their formation by thermal evaporation in vacuum have been established. The mechanism of increase of microhardness of such coatings by their surface modification by a ribbon-shaped electron steam is investigated. It is shown that the combined thermal vacuum deposition of thin ceramic coatings from powder materials on the surface of Kr1 silicon, followed by their modification by low energy electron flow in one technological cycle, allows to significantly reduce the micro relief and to stabilize the homogeneity of the coating surfaces, as well as to increase the chemical and biological resistance of these coatings to the influence of the environment. The conditions of qualitative determination of microhardness of the studied material with the use of atomic force microscopy are determined. Microhardness studies, both of modified coatings and of dielectric surfaces on which they were applied, were carried out. The fact of nonlinear increase of microhardness (by 13-17 %) of thin coatings deposited on the surface of dielectric material by the combined electron beam method as the thickness of these coatings is established. The possibility of determining the microhardness of multilayer multifunctional ceramic coatings obtained by combined electron beam technology under different conditions and different modes of technological experiment is shown. |
|
List of References |
Other articles from this number
1) Effect of the Deposition Times on the Properties of ZnO Thin Films Deposited by Ultrasonic Spray Pyrolysis for Optoelectronic Applications [06001-1-06001-5]2) Optoelectronic Study on Starch Capped Cadmium Sulfide Nanoparticles [06002-1-06002-5]
3) Effect of Annealing Time on the Optical and Structural Properties of ZnO Nanorods [06003-1-06003-4]
4) Design and Analysis of Waveguide Structure Sensor Based on Nanoparticles and Left-handed Material [06004-1-06004-5]
5) Laser-induced Point Defects in CdTe:Mn Single Crystals Irradiated by IR Laser [06005-1-06005-5]
6) The Temperature Dependence of the Quadratic Proportionality Factor of P Diffusivity in Germanium with the Free Electron Density [06006-1-06006-4]
7) Electrophysical Properties of Granular Film Alloys [06007-1-06007-4]
8) The Study of Thermally Stimulated Hydrogen Evolution from Steels by Thermal Desorption Mass Spectrometry Technique [06008-1-06008-5]
9) Local Electron Interaction with Point Defects in CdSe0.2Te0.8: Ab initio Calculation [06009-1-06009-5]
10) Sintering Temperature Dependent Optical and Vibrational Properties of Sm2NiMnO6 Nanoparticle [06010-1-06010-5]
11) Cylindrical Piezoceramic Radiator as a Complex Dynamic System [06011-1-06011-7]
12) The Dependence between the Structural-morphological Features of SiO2/TiO2 Mixesand Discharge Capacities of Lithium Power Sources [06012-1-06012-8]
13) Study of the Effect of Film Thickness on Structure and Optical Properties of Nanostructured ZnS Thin Films Deposited by Spray Technique [06013-1-06013-5]
14) Interaction During Barothermal Processing of Wurtzite Boron Nitride with Diamonds Obtained under Different Synthesis Conditions [06014-1-06014-4]
15) The High-frequency Radio-wave Surgery Method: Physics of Processes and Medical Application [06015-1-06015-4]
16) Photodetector Properties of Polyaniline/CuO Nanostructures Synthesized by Hydrothermal Technique [06016-1-06016-6]
17) Influence of Factors on the Structure and Properties of High-entropy FeCrMnCoNi Alloy [06017-1-06017-7]
18) Electronic Energy Spectra of ZnX (X = O, S, Se, Te) Crystals Obtained by Combining the Green's Function and the Hybrid Functional [06018-1-06018-5]
19) Conceive a Filter by Engraving S Resonators to the Substrate Integrated Waveguide [06019-1-06019-6]
20) Effects of Copper Doping and Annealing Temperature on the Structural, Morphological and Optical Properties of NiO Thin Films [06020-1-06020-6]
21) Sensitivity Properties of Graphene with Metal Nanoparticles [06021-1-06021-4]
22) Features of the Electrical Characteristics of an Octagraphene Nanotube [06022-1-06022-5]
23) Properties and Application of Nanoporous Silica Filled with Polyaniline and Iodine [06023-1-06023-5]
24) Layered Structure of CoCrAlY/ZrSiO4/Al2O3 Coatings Before and After Thermal Treatment [06025-1-06025-4]
25) Liquid Phase Epitaxy of Thin Isoperiodic Heterostructures of Pb1 – xSnxTe1 – ySey Solid Solutions [06026-1-06026-5]
26) Energy Structure and Stability of Merocyanine Isomers as Memory Elements or Switches [06027-1-06027-5]
27) Impact of the High-K Dielectric Material as Spacer on Analog and RF Performance of the GS-DG-FinFET [06028-1-06028-7]
28) The Quasiparticle Electronic Structure of Trigonal CaSnO3 and ZnSnO3 Crystals [06029-1-06029-5]
29) Longitudinal Magnetic Field Effect on Wave Dynamics in Multiharmonic Superheterodyne FEL of Dopplertron Type with Helical Electron Beam [06030-1-06030-5]
30) Synthesis of Pure Hydroxyapatite by Ion Exchange Reaction [06031-1-06031-4]
31) Study of Phonon Dynamics of Cu60Zr20Hf10Ti10 Bulk Metallic Glass Using Pseudopotential [06032-1-06032-3]
