| Title |
Structural, Mechanical and Optical Properties of Plasma-chemical Si-C-N Films |
| Authors |
A.O. Kozak, V.I. Ivashchenko, O.K. Porada, L.A. Ivashchenko, T.V. Tomila |
| Issue |
Volume 6, Year 2014, Number 4 |
| Pages |
04047-1 - 04047-5 |
| Title |
Optical Properties of PECVD Si-C-N Films |
| Authors |
A.O. Kozak, V.I. Ivashchenko, O.K. Porada, L.A. Ivashchenko, V. Ya. Malakhov, T.V. Tomila |
| Issue |
Volume 7, Year 2015, Number 3 |
| Pages |
03040-1 - 03040-6 |
| Title |
Photoluminescence Properties of PECVD Si-C-N Films |
| Authors |
O.K. Porada, V.S. Manzhara, A.O. Kozak, V.I. Ivashchenko, L.A. Ivashchenko |
| Issue |
Volume 9, Year 2017, Number 2 |
| Pages |
02022-1 - 02022-6 |
