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Title Deep Silicon Barrier Structure as Chemical Sensor for Detection of Hydrochloric Acid Salt Solutions
Authors А.V. Kozinets,, A.I. Manilov,, S.A. Alekseev,, S.V. Litvinenko,, V.V. Lysenko, V.A. Skryshevsky,
Issue Volume 12, Year 2020, Number 3
Pages 03015-1 - 03015-5