| Title | Deep Silicon Barrier Structure as Chemical Sensor for Detection of Hydrochloric Acid Salt Solutions | |
| Authors | А.V. Kozinets,, A.I. Manilov,, S.A. Alekseev,, S.V. Litvinenko,, V.V. Lysenko, V.A. Skryshevsky, | |
| Issue | Volume 12, Year 2020, Number 3 | |
| Pages | 03015-1 - 03015-5 | |
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