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Title Investigation of the Effect of the Composition of Residual Gases on the Hardness, Adhesion Properties and the Composition of SiC-AlN Coatings Deposited by the Magnetron Sputtering
Authors I.Yu. Gоncharov, D.A. Kolesnikov, V.Ju. Novikov, M.G. Kovaleva, S.V. Lytovchenko, B.A. Mazilin, D.V. Horokh, V.M. Beresnev, David Alejandro Diaz Yanez
Issue Volume 10, Year 2018, Number 3
Pages 03028-1 - 03028-5