Results (1):
| Title | Review of MEMS Test Structures for Mechanical Parameter Extraction | |
| Authors | A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra | |
| Issue | Volume 3, Year 2011, Number 1, Part 2 | |
| Pages | 0243 - 0253 | |
| Title | Review of MEMS Test Structures for Mechanical Parameter Extraction | |
| Authors | A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra | |
| Issue | Volume 3, Year 2011, Number 1, Part 2 | |
| Pages | 0243 - 0253 | |
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