Title | Deposition and Surface Modification of Low-K Thin Films for ILD Application in ULSI Circuits | |
Authors | Y.S. Mhaisagar, B.N. Joshi, A.M. Mahajan | |
Issue | Volume 3, Year 2011, Number 1, Part 1 | |
Pages | 0106 - 0110 |
Title | Sol-Gel Deposited Porogen Based Porous Low-k Thin Films for Interlayer Dielectric Application in ULSI Circuits | |
Authors | Yogesh S. Mhaisagar, A.M. Mahajan | |
Issue | Volume 4, Year 2012, Number 3 | |
Pages | 03002-1 - 03002-3 |