Title | Deposition and Surface Modification of Low-K Thin Films for ILD Application in ULSI Circuits | |
Authors | Y.S. Mhaisagar, B.N. Joshi, A.M. Mahajan | |
Issue | Volume 3, Year 2011, Number 1, Part 1 | |
Pages | 0106 - 0110 |
Title | Impact of Annealing Temperature on Surface Reactivity of ZnO Nanostructured Thin Films Deposited on Aluminum Substrate | |
Authors | Zehira Belamri, Warda Darenfad, Noubeil Guermat | |
Issue | Volume 15, Year 2023, Number 2 | |
Pages | 02026-1 - 02026-4 |