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Title The Influence of Layer Thickness and Deposition Conditions on Structural State of NbN/Cu Multilayer Coatings
Authors O.V. Sobol′, A.A. Andreev, A.A. Meylekhov, А.А. Postelnyk, V.A. Stolbovoy, I.M. Ryshchenko, Yu.Ye. Sagaidashnikov, Zh.V. Kraievska
Issue Volume 11, Year 2019, Number 1
Pages 01003-1 - 01003-5