Title | The Influence of Layer Thickness and Deposition Conditions on Structural State of NbN/Cu Multilayer Coatings | |
Authors | O.V. Sobol′, A.A. Andreev, A.A. Meylekhov, А.А. Postelnyk, V.A. Stolbovoy, I.M. Ryshchenko, Yu.Ye. Sagaidashnikov, Zh.V. Kraievska | |
Issue | Volume 11, Year 2019, Number 1 | |
Pages | 01003-1 - 01003-5 |