Title | Deep Silicon Barrier Structure as Chemical Sensor for Detection of Hydrochloric Acid Salt Solutions | |
Authors | А.V. Kozinets,, A.I. Manilov,, S.A. Alekseev,, S.V. Litvinenko,, V.V. Lysenko, V.A. Skryshevsky, | |
Issue | Volume 12, Year 2020, Number 3 | |
Pages | 03015-1 - 03015-5 |