Results (1):
| Title | Investigation of the Effect of the Composition of Residual Gases on the Hardness, Adhesion Properties and the Composition of SiC-AlN Coatings Deposited by the Magnetron Sputtering | |
| Authors | I.Yu. Gоncharov, D.A. Kolesnikov, V.Ju. Novikov, M.G. Kovaleva, S.V. Lytovchenko, B.A. Mazilin, D.V. Horokh, V.M. Beresnev, David Alejandro Diaz Yanez | |
| Issue | Volume 10, Year 2018, Number 3 | |
| Pages | 03028-1 - 03028-5 | |
