Results (2):
| Title | Features of Structure of Magnetron Films Si3N4 and SiC | |
| Authors | A.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, E.A. Pilyuk, M.B. Dobromyslov | |
| Issue | Volume 5, Year 2013, Number 4 | |
| Pages | 04025-1 - 04025-3 | |
| Title | RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells | |
| Authors | V.S. Zakhvalinskii, E.A. Piljuk, I.Yu. Goncharov, V.G. Rodriges, A.P. Kuzmenko, S.V. Taran, P.A. Abakumov | |
| Issue | Volume 6, Year 2014, Number 3 | |
| Pages | 03062-1 - 03062-3 | |
