Results (2):

Title Deposition and Surface Modification of Low-K Thin Films for ILD Application in ULSI Circuits
Authors Y.S. Mhaisagar, B.N. Joshi, A.M. Mahajan
Issue Volume 3, Year 2011, Number 1, Part 1
Pages 0106 - 0110
Title Sol-Gel Deposited Porogen Based Porous Low-k Thin Films for Interlayer Dielectric Application in ULSI Circuits
Authors Yogesh S. Mhaisagar, A.M. Mahajan
Issue Volume 4, Year 2012, Number 3
Pages 03002-1 - 03002-3