Results (1):
| Title | Deposition and Surface Modification of Low-K Thin Films for ILD Application in ULSI Circuits | |
| Authors | Y.S. Mhaisagar, B.N. Joshi, A.M. Mahajan | |
| Issue | Volume 3, Year 2011, Number 1, Part 1 | |
| Pages | 0106 - 0110 | |
| Title | Deposition and Surface Modification of Low-K Thin Films for ILD Application in ULSI Circuits | |
| Authors | Y.S. Mhaisagar, B.N. Joshi, A.M. Mahajan | |
| Issue | Volume 3, Year 2011, Number 1, Part 1 | |
| Pages | 0106 - 0110 | |
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