Piezoelectric Film Waveguides for Surface Acoustic Waves

Authors M.F. Zhovnir
Affiliations

National Technical University of Ukraine "Kyiv Polytechnic Institute" 16/9, Polytechnique st., 03056 Kyiv-56, Ukraine

Е-mail zhovnir101@gmail.com
Issue Volume 8, Year 2016, Number 4
Dates Received 02 June 2016; revised manuscript received 22 November 2016; published online 29 November 2016
Citation M.F. Zhovnir, J. Nano- Electron. Phys. 8 No 4(1), 04007 (2016)
DOI 10.21272/jnep.8(4(1)).04007
PACS Number(s) 77.65.Dq, 64.60.Ej
Keywords Surface acoustic wave (SAW), SAW waveguide and concentrator, Dispersion equation, The dispersion of the phase velocity of the wave, Optical sensing.
Annotation The paper presents results of mathematical modeling of piezoelectric film waveguide structures for surface acoustic waves (SAW). Piezoelectric ZnO film is supposed to be placed on a fused quartz substrate. The analytical ratios and numerical results allow to determine the design parameters of the waveguide structures to provide a single-mode SAW propagation mode. The results of amplitude and phase experimental studies of the SAW in the waveguide structures that were carried out on the laser optical sensing set up confirm the theoretical calculations.

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