An Improved SPICE Model for MEMS Based Capacitive Accelerometers

Автор(ы) C. Kavitha, M. Ganesh Madhan
Принадлежность

Department of Electronics Engineering, Anna University, M.I.T Campus, 600 044 Chennai, India

Е-mail kaviphd2011@yahoo.co.in, mganesh@annauniv.edu
Выпуск Том 5, Год 2013, Номер 2
Даты Получено 15.02.2013, в отредактированной форме – 29.04.2013, опубликовано online – 04.05.2013
Ссылка C. Kavitha, M. Ganesh Madhan, J. Nano- Electron. Phys. 5 No 2, 02011 (2013)
DOI
PACS Number(s) 85.85. + jх
Ключевые слова Squeezed film, Capacitive accelerometer, Thermal effect, Damping, Electrical attractive force.
Аннотация An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator.

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