Investigation of Deposition Conditions of Thin Copper Films from Electrode Destruction Products of Overvoltage High-voltage Discharge in High Pressure Argon

Автор(ы) O.K. Shuaibov1, O.Y. Mynia1, V.I. Chyhin2, R.V. Hrytsak1, A.O. Malinina1, M.I. Vatrala1, Z.T. Homoki1
Принадлежность

1Uzhhorod National University, 3, Narodna Sq., 88000 Uzhhorod, Ukraine

2Lviv Polytechnic National University, 12, Bandera Str., 79013 Lviv, Ukraine

Е-mail alexsander.shuaibov@uzhnu.edu.ua
Выпуск Том 13, Год 2021, Номер 5
Даты Received 16 April 2021; revised manuscript received 20 October 2021; published online 25 October 2021
Ссылка O.K. Shuaibov, O.Y. Mynia, et al., J. Nano- Electron. Phys. 13 No 5, 05003 (2021)
DOI https://doi.org/10.21272/jnep.13(5).05003
PACS Number(s) 52.80. − s, 51.50. + v, 52.80.Tn, 52.90. + z, 52.80.Mg, 79.60.Jv
Ключевые слова High-voltage nanosecond discharge, Copper (8) , Plasma (12) , UV radiation.
Аннотация

The characteristics of a high-voltage nanosecond discharge between copper electrodes in argon at pressures of 100-150 kPa are given. In the process of microexplosions of inhomogeneities on the working surfaces of electrodes in a strong electric field, copper vapors were introduced into the discharge gap due to the formation of ectons. This created the preconditions for the synthesis of thin nanostructured copper films of ultrafine copper powder. Copper films were deposited on a dielectric substrate installed near the electrode system. The spatial and electrical characteristics of high-voltage nanosecond discharge at a distance between the electrodes d = 2 mm were studied. The study of radiation spectra of discharge and oscillograms of radiation of the most intense spectral lines and bands was carried out, which allowed to establish the main excited products formed in plasma. The results of optimization of the intensity of UV radiation of discharge depending on the frequency, magnitude of the charging voltage and interelectrode distance are presented. The time-averaged UV radiation of the point emitter was optimized depending on the supply voltage of the high-voltage modulator and the frequency of discharge pulses. The light transmission spectra of thin copper films synthesized in the experiment were studied.

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