Properties Evolution of Ion-plasma Coatings on the Base of Transition Metal Nitrides

Автор(ы) P.V. Turbin, V.M. Beresnev , D.V. Horokh

V.N. Karazin Kharkiv National University, 4, Svobody Sq., 61022 Kharkiv, Ukraine

Выпуск Том 12, Год 2020, Номер 5
Даты Received 21 August 2020; revised manuscript received 15 October 2020; published online 25 October 2020
Ссылка P.V. Turbin, V.M. Beresnev, D.V. Horokh, J. Nano- Electron. Phys. 12 No 5, 05031 (2020)
PACS Number(s) 81.07.Bc, 61.05.сp,, 61.82.Rx
Ключевые слова Vacuum-arc sputtering method, Physical parameters of coating formation, Physical and technical properties of coatings.

Some regularities of formation of coatings on the basis of nitrides of transition metals obtained by vacuum-arc method are determined. The coatings were formed using RF pulse stimulation of the substrate. In order to eliminate the droplet fraction, ion-plasma flow separation was used. To determine the physical and mechanical properties of the coatings, scanning electron microscopy and the nanoindentation method were used. The surface morphology of the coatings was analyzed using an electron-ion microscope. The evolution of physical and mechanical properties of the coatings was determined by the physical parameters of deposition. The composition of the sprayed cathodes, reaction gas pressure, the displacement potential applied to the substrate determine the structural and phase state of the obtained coatings and, thus, their physical and technical characteristics. The use of silicon as an alloying element allows to form an intercrystalline layer of Si3N4. Segregation of amorphous or quasiamorphic matter in the intercrystalline space determines the composite structure of the coating. Composite coatings are characterized by more advanced physical and mechanical properties. The nanocomposite coatings obtained in the work reach the state of superhard coatings (53 GPa) and high values of the modulus of elasticity (430 GPa). Under certain conditions, the formation of the coating acquires a textured state. The degree of change in the size of the coherent scattering regions from the deposition conditions is analyzed. It is established that the optimal control of the physical parameters of deposition allows to form ion-plasma protective coatings with programmable properties.

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