Thermal Effects on the Surface Morphology of an Ion-plasma Coating

Автор(ы) P.V. Turbin , D.V. Horokh

V.N. Karazin Kharkiv National University, 4, Svobody Square, 61000 Kharkiv, Ukraine

Выпуск Том 12, Год 2020, Номер 4
Даты Received 24 February 2020; revised manuscript received 15 August 2020; published online 25 August 2020
Ссылка P.V. Turbin, D.V. Horokh, J. Nano- Electron. Phys. 12 No 4, 04031 (2020)
PACS Number(s) 61.46. ± w, 62.20.Qp, 62.25. ± g
Ключевые слова Vacuum-arc coatings, Surface morphology (2) , Statistical characteristics of surface topography, Thermal impact.

The dependence of the surface morphology of ion-plasma coatings on the temperature influence in vacuum was investigated. The coatings were formed by vacuum-arc method with the use of pulsed high-frequency stimulation of deposition. To compare the frictional properties, Ti-Hf metal coatings obtained in argon medium and (Ti-Hf-Si)N composite coatings were investigated. The coatings were annealed in a high temperature vacuum oven. The roughness of the coatings was investigated using a profilometer. In order to detail the structure of the surface of coatings before and after annealing, a study was carried out using an atomic force microscope. It is established that thermal influence on the surface of nanostructured coatings significantly changes the surface morphology. Such changes lead to the evolution of the structural and physico-mechanical characteristics of the coatings. The results of tribotechnical studies of Ti-Hf and (Ti-Hf-Si)N coatings are presented. The results of thermal influence on the samples of (Ti-Hf-Si)N nanocomposite coating are analyzed. The results of the study of the surface of these coatings are compared. A decrease in the (Ti-Hf-Si)N coating roughness was found by annealing and an increase in hardness to 55.7 GPa. The evolution of the surface morphology of the coatings is the result of changes in the coating structure and recrystallization processes. The studied statistical characteristics of the relief of the surface of the coatings are consistent with other experimental results.

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