Production, Structure and Properties of Coatings Based on Al2O3 Obtained by Magnetron Method

Автор(ы) D.А. Kolesnikov1, I.V. Sudzhanskaya1 , I.Yu. Goncharov1,2 , S.V. Lytovchenko3, V.Yu. Novikov1 , Е.А. Kudryavtsev1, B.O. Mazilin3, Е.V. Krytsyna1, V.M. Beresnev3 , O.V. Glukhov4

Belgorod State National Research University, 85, Pobiedy St., 308015 Belgorod, Russia

2 Belgorod State Technological University named after V.G. Shukhov, Belgorod, Russia

3 V.N. Karazin Kharkiv National University, 4, Svoboby Sq., 61000 Kharkiv, Ukraine

4 National University of Radio Electronics, 14, Science Boulevard, 61166 Kharkiv, Ukraine

Выпуск Том 12, Год 2020, Номер 1
Даты Received 22 January 2020; revised manuscript received 15 February 2020; published online 25 February 2020
Ссылка D.А. Kolesnikov, I.V. Sudzhanskaya, I.Yu. Goncharov, et al., J. Nano- Electron. Phys. 12 No 1, 01022 (2020)
PACS Number(s) 61.46. – w, 62.20.Qp, 62-65. – g
Ключевые слова Magnetron by sputtering, Multilayer oxide coatings, Structure (102) .

Al2O3 and Al2O3/ZrO2 multilayer coatings were deposited by the magnetron method by sputtering the corresponding metal targets in a mixture of oxygen and argon gases. The microstructure of the cross sections to determine the thickness and elemental composition of the obtained coatings was studied by transmission and scanning electron microscopy. The surface morphology of Al2O3 coating samples was studied by scanning probe microscopy. It is shown that the formed Al2O3 coating and the Al2O3/ZrO2 multilayer coating have a columnar structure with the columns oriented perpendicular to the surface. The columnar structure of multilayer coatings is not violated during the transition from layer to layer. The coating surface consists of globules with a diameter of about 20 nm. It was found that the Al2O3 coating has dielectric properties using the method of impedance spectrometry. Thus, it was shown that the magnetron method can be used to apply high-quality multilayer dielectric coatings, which can be used as thermal barrier coatings to protect the blades of high-temperature stages of aircraft engine turbines.

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