Basic Study of Mono-like Silicon Material Properties under Chemical Treatments: Comparison with Single and mc-Silicon

Автор(ы) G. Benseba1, A. Moussi2, S. Meziani2, D. Hocine1, M.S. Belkaid1
Принадлежность

1Advanced Technologies Laboratory of Electrical Engineering (LATAGE), University Mouloud Mammeri ofTizi-Ouzou (UMMTO), BPN 17 R.P, Tizi Ouzou, Algeria

2DDCS Division, Research Center for Semiconductor Technology for Energy (CRTSE), Algeria, 02 Bd. Frantz Fanon, B.P 140 Alger –7 Merveilles –Algiers Algeria

Е-mail ghaliabenseba@yahoo.fr
Выпуск Том 11, Год 2019, Номер 5
Даты Received 07 May 2019; revised manuscript received 23 October 2019; published online 25 October 2019
Ссылка G. Benseba, A. Moussi, et al., J. Nano- Electron. Phys. 11 No 5, 05003 (2019)
DOI https://doi.org/10.21272/jnep.11(5).05003
PACS Number(s) 65.40.gk, 77.55.df, 81.40. – z
Ключевые слова Mono-like (quasi-single crystalline) silicon, Physico-chemical properties, Chemical treatment, Analysis (25) , Texturing.
Аннотация

In this paper, we present the study of the silicon mono-like (ML-Si) material. Its physical and chemical properties are analyzed and compared to those of Czochralski-monocrystalline silicon (Cz-Si) and multicrystalline silicon (mc-Si). After chemical treatment of each material, the surface is analyzed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). We observe that Cz-Si and ML-Si present the same morphology and crystallographic orientation. FTIR analysis shows an (interstitial) oxygen content of the same order for three materials but with values of ML-Si closer to that of mc-Si. Substitutional carbon concentration is intermediate for ML-Si between those of Cz-Si and mc-Si. Reflectivity of ML-Si is 5 % higher than that of Cz-Si and much lower than mc-Si surface after NaOH texture. Photoluminescence analysis indicates that ML-Si and Cz-Si materials present better homogeneity than mc-Si material. At the final, we present the advantages and drawbacks of ML-Si material with regard to Cz-Si and mc-Si. ML-Si has better material properties, having fewer grain boundaries and dislocations compared to mc-Si. In addition, containing a single grain allows a lower surface reflectance to be obtained by using alkaline texturing. We also find that ML-Si is almost identical to Cz-Si.

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