The Structural-Phase State and Diffusion Process in Film Structures Based on Co and Ru
| Автор(ы) | I.V. Cheshko1, A.M. Lohvynov1, A.I. Saltykova2, S.I. Protsenko1 |
| Принадлежность |
1Sumy State University, 2, Rimsky-Korsakov Str., 40007 Sumy, Ukraine 2Sumy State Pedagogical University named after A.S. Makarenko, 87, Romens’ka Str., 40002 Sumy, Ukraine |
| Е-mail | cheshko.iryna@gmail.com |
| Выпуск | Том 10, Год 2018, Номер 6 |
| Даты | Получено 15.08.2018; в отредактированной форме 04.12.2018; опубликовано online 18.12.2018 |
| Ссылка | I.V. Cheshko, A.M. Lohvynov, A.I. Saltykova, S.I. Protsenko, J. Nano- Electron. Phys. 10 No 6, 06016 (2018) |
| DOI | https://doi.org/10.21272/jnep.10(6).06016 |
| PACS Number(s) | 05.70. – a, 61.72.Mm, 61.72.Lk, 62.20.F –, 64.10. + h, 64.60.My, 68.35.Md, 83.10. – y |
| Ключевые слова | Thin film (96) , Synthetic antiferromagnetic layer, Crystal structure (8) , Phase composition (3) , Diffusion (9) , Secondary ion mass spectrometry. |
| Аннотация |
Investigation results of crystalline structure, phase composition and diffusion processes in film systems based on Co and Ru in the thickness range 5÷60 nm before and after annealing to temperature 600 К are represented. It was shown that the film system Co / Ru / S and Co / Ru / Со / S consist of a phase hcp-Co and hcp-Ru. Film systems consisting of Ru layers before and after annealing have a nanodispersed crystalline texture. The average size of crystallites samples before annealing does not exceed 3÷5 nm, after annealing the maximum average size was 16 nm for samples with layer thicknesses 60 nm. The results of the study of the diffusion process of two-layer film systems Co / Ru / in different thickness ranges showed that before and after annealing the relative individuality of separate layers is preserved since the calculated values of thermal diffusion effective coefficients for relatively thin and thick films lie in the range from 0.1 to 1.1 × 10 – 19 m2 / sec. |
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Список литературы |
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