The Use of Negative Bias Potential for Structural Engineering of Vacuum-Arc Nitride Coatings Based on FeCoNiCuAlCrV High-Entropy Alloy

Автор(ы) O.V. Sobol′1, A.A. Andreev2 , V.F. Gorban′3, A.A. Meylekhov1 , А.А. Postelnyk1 , V.A. Stolbovoy2 , A.V. Zvyagolskiy1

1National Technical University «Kharkiv Polytechnic Institute», 2, Kyrpychov Str., 61002 Kharkiv, Ukraine

2National Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., 61108 Kharkiv, Ukraine

3Frantsevich Institute for Problems of Materials Science, 3, Krzhizhanovsky Str., 03142 Kiev, Ukraine

Выпуск Том 10, Год 2018, Номер 6
Даты Получено 22.08.2018; в отредактированной форме 29.11.2018; опубликовано online 18.12.2018
Ссылка O.V. Sobol′, A.A. Andreev, V.F. Gorban′, et al., J. Nano- Electron. Phys. 10 No 6, 06030 (2018)
PACS Number(s) 64.75.St, 81.07.Bc, 62.25. – g, 61.05.cp, 61.82.Rx
Ключевые слова Vacuum arc, FeCoNiCuAlCrV, Structural engineering, Bias potential (2) , Рressure, Phase composition (3) , Texture (2) , Hardness (10) .

The effect of negative bias potential (Ub = – 40, – 110, and – 200 V) upon the deposition of multi-element coatings on their composition, structure, and mechanical properties was studied. It is shown that when using a high-entropy multi-element (of 7 elements) FeCoNiCuAlCrV alloy, it is possible to obtain a single-phase nitride (FeCoNiCuAlCrV)N. Nitride has an fcc crystal lattice (structural type NaCl). It has been established that with an increase in Ub in the structural state occurs transition from practically non-textured (polycrystalline) to the preferential orientation of the growth of crystallites with the [111] texture axis (at Ub = – 110 V) and [110] (at Ub = – 200 V). This is accompanied by a decrease in the lattice period, as well as a decrease in hardness and modulus of elasticity. For coatings (FeCoNiCuAlCrV) N, the highest hardness of 38 GPa is achieved by using the smallest (– 40 V) bias potential during the deposition process. It is shown that to achieve high hardness at high Ub it is necessary to increase the content in the high-entropy alloy of elements with high nitride-forming ability.

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