(TiZr)N/(TiSi)N Maitilayer Nanostructured Coatings obtained by Vacuum Arc Deposition

Автор(ы) S.V. Lytovchenko1 , B.А. Mazilin1, V.M. Beresnev1 , V.А. Stolbovoy2, M.G. Kovalyova3, Е.V. Kritsyna3, I.V. Kolodiy2, О.V. Glukhov4 , L.V. Malikov5

1V.N. Karazin Kharkiv National University, Kharkiv, Ukraine

2National Scientific Centre “Kharkiv Institute of Physics and Technology”, Kharkiv, Ukraine

3Belgorod National Research University, Belgorod, Russian Federation

4Kharkiv National University of Radio Electronics, Kharkiv, Ukraine

5Scientific Centre of Physical Technologies of the Ministry of Education and Science and National Academy of Science of Ukraine, Kharkiv, Ukraine

Выпуск Том 10, Год 2018, Номер 5
Даты Получено 16.09.2018; в отредактированной форме 22.10.2018; опубликовано online 29.10.2018
Ссылка S.V. Lytovchenko, B.А. Mazilin, V.M. Beresnev, et al., J. Nano- Electron. Phys. 10 No 5, 05041 (2018)
DOI https://doi.org/10.21272/jnep.10(5).05041
PACS Number(s) 61.46. – w, 62.20.Qp, 62-65. – g
Ключевые слова Nitride coatings, Multilayer coating, Composition of elements, Structure (102) , Microhardness (2) , Adhesive strength.

The paper investigates the structure and properties of nanoscale multilayer coatings based on (TiZr)N and (TiSi)N produced by vacuum arc technique. Also, it provides an analysis of the impact of partial pressure of nitrogen on structural and phase state of coatings. The nitride phases are strongly textured, crystallographic planes (111) of most grains are oriented parallel to the surface. Dimensions of the coherent scattering regions and values of micro-distortions of the lattice have been calculated. The hardness of coatings reached 37.1 GPa, and the adhesion fracture load exceeds 150 N. The process technology ensures high uniformity of and a low defect rate in obtained coatings.

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