Scandium-silicon Multilayer X-ray Mirrors with CrB2 Barrier LayersScSiCrB

Автор(ы) Yu.P.  Pershyn1, A.Yu. Devizenko1, E.N. Zubarev1, V.V. Kondratenko1, D.L. Voronov2 , E.M. Gullikson2
Принадлежность

1National Technical University “Kharkiv Polytechnic Institute, 2, Kyrpycheva Str., 61002 Kharkiv, Ukraine

2Advanced Light Source, Berkeley National Laboratory, 1, Cyclotron Road, MS 15R0217, Berkeley, CA 94720 USA

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Выпуск Том 10, Год 2018, Номер 5
Даты Получено 18.07.2018; в отредактированной форме 24.10.2018; опубликовано online 29.10.2018
Ссылка Yu.P. Pershyn, A.Yu. Devizenko, E.N. Zubarev, et al., J. Nano- Electron. Phys. 10 No 5, 05025 (2018)
DOI https://doi.org/10.21272/jnep.10(5).05025
PACS Number(s) 61.05.cm, 61.43.Dq, 68.65.Ac, 41.50. + h, 07.85.Fv
Ключевые слова Multilayer X-ray mirror, Interlayer, Barrier layer, Reflectivity, Extreme ultraviolet.
Аннотация

Methods of X-ray reflectometry (  0.154 nm), cross-sectional transmission electron microscopy and reflectometry in the EUV region (  41-51 nm) were used to investigate the barrier properties of CrB2 layers 0.3-1.3 nm thick in Sc/CrB2/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. It is shown that barrier layers of ~ 0.3 nm separate Sc and Si layers completely and prevent interacting the Sc and Si layers. Thinner chromium diboride layers interact with the matrix layers forming interlayers containing mostly ScB2 on the Si-on-Sc interfaces and CrSi2 on the Sc-on-Si ones. Scandium-silicon MXMs with barrier layers on the both interfaces are shown to retain high reflectivity at the wavelength of  ~ 47 nm.

Список литературы